Zvanut, O. Richardson, HF chemical etching of SiO 2 on 4H and 6H SiC. J. Electron. Mater. 29 (3), 368–371 (2000)M. B. Johnson,M. E. Zvanut,Otha Richardson.HF chemical etching of SiO2 on 4H and 6H SiC[J]. Journal of Electronic Materials .2000(3)...
HF is commonly used as an etchant to remove SiO2 layers during the fabrication process of integrated circuits. The reaction allows for precise control over the etching process, enabling the creation of intricate circuit patterns on silicon wafers. Additionally, the reaction is also employed in the...
例如,HF可以与SiO₂反应生成四氟化硅(SiF₄),这是一种气体,可以随溶液挥发而被去除。 2. **干法刻蚀**:通过物理轰击和化学反应相结合的方式去除SiO₂。主要包括反应性离子刻蚀(RIE, Reactive Ion Etching)和等离子体刻蚀等。在这些方法中,高能粒子(如离子或自由基)撞击SiO₂表面,引发化学反应并产生挥发性...
显然反应速率与𝐅−和𝑯++的浓度有关,因此在腐蚀过程中通常加入氟化铵(𝐍𝐇4𝐅)作为缓冲剂,𝐍𝐇4𝐅能够电离生成𝐅−以补充随着反应推进而逐渐减少的𝐅−数量,并使HF电离平衡向左移动,调节溶液的PH值,以减轻腐蚀液对光刻胶的腐蚀作用。加入𝐍𝐇4𝐅的HF溶液称为BOE(bufferedoxideetching)...
The local mechanisms of dissociative chemisorption and reactive etching are investigated by molecular models modeling SiOH groups and SiOSi bridges at SiO 2 surfaces. The elementary reaction paths for the reactions of HF and HCl with Si O bonds of the models, Si(OH) 4 and (HO) 3 SiOSi(OH...
这样处理是为了增加光刻胶与基片间的粘附能力,防止显影时光刻胶图形的脱落以及防止湿法腐蚀时产生侧面腐蚀(side etching)。光刻胶的涂敷是用转速和旋转时间可自由设定的甩胶机来进行的。首先、用真空吸引法将基片吸在甩胶机的吸盘上,将具有一定粘度的光刻胶滴在基片的表面,然后以设定的转速和时间甩胶。由于离心力...
摘要: , giving an aspect ratio of 5, which is up to 40 times larger compare to earlier work where HF wet etching was used. This ion track lithography technique shows a potential to produce nanostructures with even higher aspect ratios.关键词:...
建议看看赵东元刚发的一篇JACS Hydrothermal Etching Assisted Crystallization: A Facile Route to Functional...
利用十倍稀释 的 40%HF 溶液 进行试 验 ,刻蚀时 间为20 S。 图5 所示是在三寸片随机均匀取点在刻蚀前后 的数据 ,刻蚀 速率约为 3 400 ～4 000 A/min,并保持很好 的刻蚀 均匀性 。 图4 薄膜附着力测试 李琼文等 :低 温沉积 SiO:薄膜工艺的研究 17 1 与CVD沉积的 SiO 薄膜相比 ,抗蚀...
was formed. The surface of Si rich silicon oxide was etched by HF and then post-annealed. Both the HF surface etching and the temperature of the post-annealing were reported to be key factors associated with the color of light emission. Red emission color was obtained from the HF treatment...