我们今天使用的聚焦离子束(Focused ion beam,FIB)仪器的技术起源于外太空,更确切地说,是应用离子束推进航天器。在太空中,只有通过喷射物质(即所谓的reaction mass)才能产生推力。除了基于燃烧的化学推进器外,离子推进器已成为高精度运动的重要工具。 备注:在物理学和工程学中,"reaction mass"(反应物质)指的
1.1Ion Source and System Optics The capabilities of high-resolution (HR)focused ion beam(FIB) systems are submicrometer beam sizes with current densities on the target of >1Acm−2; these are achieved with relatively simple two-lens optical systems. The reason a simple optical system can achiev...
Picard, YN, Adams, DP, Vasile, MJ (2003) Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components. Precis Eng 27: pp. 59-69Picard, Y.N., Adams, D.P., Vasile, M.J., and Ritchey, M.B., Focused Ion Beamed-shaped Microtools for Ultra-precision ...
FIB的应用Focused Ion Beam 聚焦离子束显微镜 (Focused Ion Beam, FIB) 聚焦离子束显微镜是运用镓 (Ga) 金属来做为离子源。因为镓的熔点为 29.76°C,且在此时的蒸气压为«10-13 Torr,所以很适合在真空下操作。在…
superior to the traditional Focused Ion Beam (FIB) technology; it can reduce lamella thickness below [...] camtek.co.il AIM、SELA独特的适应性离子研磨技 术比传统的 聚焦离子 束( FIB )激 素和优越;它可以将从大面积材料制作的样品厚度降低到20纳米以下,精确度高、无伪影质量、厚度变化可控且 产...
聚焦离子束技术(FocusedIon beam,FIB)是利用电透镜将离子束聚焦成非常小尺寸的离子束轰击材料表面,实现材料的剥离、沉积、注入、切割和改性。随着纳米科技的发展,纳米尺度制造业发展迅速,而纳米加工就是纳米制造业的核心部分,纳米加工的代表性方法就是聚焦离子束。近年来发展起来的聚焦离子束技术(FIB)利用高强度聚焦离子...
聚焦离⼦束（FocusedIonbeam,FIB）聚焦离⼦束(Focused Ion beam, FIB)的系统是利⽤电透镜将离⼦束聚焦成⾮常⼩尺⼨的显微切割仪器，⽬前商⽤系统的离⼦束为液相⾦属离⼦源(Liquid Metal Ion Source,LMIS)，⾦属材质为镓(Gallium, Ga)，因为镓元素具有低熔点、低蒸⽓压、及良好的抗氧化...
聚焦离子束(FocusedIonBeam) 其在半导体工业之应用 余维斌,黄坤火,柯大华 (宜硕科技(上海)有限公司,IECQ认证实验室,上海201103) 原理与 摘要:聚焦离子束被广泛应用于芯片电路修改,研磨,沉积和二次电子/离子成 像.FIB对于新原 型电路设计的修改以及离子间交互作用的基础研究具有独特之性能. ...
including 28nm and beyond. During a period when it takes $10 million or more to bring a device to market, focused ion beam (FIB) circuit edit has become strategically important tool for reducing costs, optimizing performance and functionality, mitigating risk, and speeding time to market for co...
Focused Ion Beam System (FIB/FIB-SEM) Lineup Focused Ion and Electron Beam System Ethos NX5000 The Hitachi Ethos FIB-SEM incorporates the latest-generation FE-SEM with superb beam brightness and stability. Ethos delivers high-resolution imaging at low voltages combined with ion optics for ...