Davies, S.., Khamsehpour, B., "Focused ion beam machining and deposition for nanofabrication," Vacuum 47(5), 455-462 (1996).S.T. Davis, B. Khamsehpur, "Focused ion-beam machining and deposition for nanofabrication", Vacuum, 47 [5], 455-62 (1996)...
focused gallium ion beam machiningMicro-dies for Co-less polycrystalline WC and WC–10wt%Co have been machined by a focused-Ga+-ion beam (30keV and 187pA) and their surfaces investigated by atomic force microscopy. The surface of the Co-less WC micro-die was extremely smooth with a ...
Cross-sectional processing of wire bonding (Processing size: W: 95 µm, D: 55 µm; Machining time: 20 min) 2. Ultra-Low Damaged TEM Sample Preparation by Low-kV Processing (0.5 kV or higher) and improved Secondary Electron Image Resolution at Low kV ...
focused ion beam technologyion-surface impactmicromachiningoptical filmsscanning electron microscopysputter etchingtitanium compoundswear resistant coatings/ focused ion beam machiningFocused ion beam (FIB) systems have become a useful tool in the failure analysis and modification of microelectronic devices ...
Cross-sectional processing of wire bonding (Processing size: W: 95 µm, D: 55 µm; Machining time: 20 min) 2. Ultra-Low Damaged TEM Sample Preparation by Low-kV Processing (0.5 kV or higher) and improved Secondary Electron Image Resolution at Low kV ...
Textile research Focused Ion Beam Nanomachining of Thermoplastic Polymers NORTH CAROLINA STATE UNIVERSITY Dieter P. GriffisC. Maurice Balik WongKa ChunCommercially available Gafocused ion beam (FIB) instruments with nanometer size probe allows for in situ materials removal (sputtering) and addition (...
surface roughness/ nanomachiningNanocrystalline and sub-microcrystalline samples of nickel have been machined by a focused Ga+ ion beam (30keV and 187pA) at doses of 8.92×1016–2.68×1018 ions/cm2 and their surface topography was investigated by atomic force microscopy (AFM). Values of the ...
7. A focused ion beam machining apparatus comprising: an ion source; an ion beam control system for accelerating, focusing and deflecting an ion beam emitted from said ion source; a secondary particle detector for detecting secondary particles emitted from a sample by irradiating the ion beam onto...
Non-conventional methods of machining are used for many engineering applications where the traditional processes fail to be cost-effective. Such processes include Ion Beam Machining (IBM), focused ion beam (FIB) machining and plasma discharge machining. The mechanisms of material removal and associated...
Guénolé, J., Prakash, A. & Bitzek, E. Atomistic simulations of focused ion beam machining of strained silicon.Appl. Surf. Sci.416, 86–95 (2017). ArticleADSGoogle Scholar Nordlund, K. et al. Improving atomic displacement and replacement calculations with physically realistic damage models....