作为改善方式,就是导入 FinFET(Tri-Gate)这个概念,如右上图。在 Intel 以前所做的解释中,可以知道藉由导入这个技术,能减少因物理现象所导致的漏电现象。 更重要的是,藉由这个方法可以增加 Gate 端和下层的接触面积。在传统的做法中(左上图),接触面只有一个平面,但是采用 FinFET(Tri-Gate)这个技术后,接触面将...
S·S·艾哈迈德汪海宏俞斌CN1902742A * Dec 21, 2004 Jan 24, 2007 先进微装置公司 Damascene tri-gate FinFET
“过去人们认为只有采用EUV光刻机才有可能制造出Finfet晶体管,不过由于ASML或者尼康生产的193nm液浸式光刻机具有极高的套准精度(overlay),因此也有可能采用这种光刻机制造出Finfet晶体管。” Finfet侧墙掺杂密度控制示意图 另外,尽管采用PIII(Plasma-immersion ion implantation)离子注入工艺可以实现,但如何保证Fin两侧...
Gartner的分析报告称要实现Finfet技术,需要克服许多制造技术方面的难关。比如要制造出Finfet晶体管,要求光刻机的图像对准性能较好。“过去人们认为只有采用EUV光刻机才有可能制造出Finfet晶体管,不过由于ASML或者尼康生产的193nm液浸式光刻机具有极高的套准精度(overlay),因此也有可能采用这种光刻机制造出Finfet晶体管。
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The device in (a) is representative of a FinFET while (b) is representative of a Tri-Gate FET and (c) is a planar FET device. The FinFET includes a spacer at the top of the fin and is considered a dual-gated device with a gate on two sides of the channel. The Tri-Gate FET,...
Accordingly, new MOSFET structures, such as the dual-gate (FinFET) and the tri-Gate transistor, have been proposed to replace the conventional planar MOSFET. These devices are compatible with conventional silicon integrated circuit processing, but offer superior performance as the device is scaled ...
A method for making a tri-gate FinFET and a dual-gate FinFET includes providing a semiconductor on insulator (SOI) wafer having a semiconductor layer over ... R Lee,DY Xiao,GQ Chen 被引量: 0发表: 2018年 METHODS OF INTEGRATING MULTIPLE GATE DIELECTRIC TRANSISTORS ON A TRI-GATE (FINFET)...
We compare our technique with the tied gate (TG) FinFET SRAM and the previously proposed independent gate (IG) FinFET SRAM with pass-gate feedback. The effects of quantum confinement in scaled FinFETs on the device and SRAM characteristics are analyzed in detail. We show that quantum ...
A charge based trans-capacitance model is proposed for undoped or lightly doped Trigate FinFET. The drain current continuity principle and the Ward-Dutton linear charge partition method are used to estimate the charge on the three terminals, namely, gate, source and drain. The MATLAB simulation ...