Validity and probability of dry etcher system to produce next generation photomask were discussed.Hyuk-Joo KwonKwang-Sik OhByung-Soo ChangBoo-Yeon ChoiKyung-Ho ParkSoo-Hong JeongSPIE-The International Society for Optical EngineeringAnnual BACUS symposium on photomask technology...
In this paper, the inductively coupled plasma ( ICP) etching equipment NE550 manufactured by ULVAC is used to study the dry etching process of Cr material. In the experiment, photoresist was used as the etching mask, and Cl2 / O2 gas was used as the process gas. By adjusting the ...
Cl{sub 2}-based dry etching of the AlGaInN system in inductively coupled plasmas Cl{sub 2}-based Inductively Coupled Plasmas with low additional dc self- biases(-100V) produce convenient etch rates(500-1500 A /min) for GaN, AlN, InN, In... H Cho,CB Vartuli,CR Abernathy,... - 《...
Dry etching and laser cleaning of ancient-like bronzes Laser ablation was performed via Q-switched Nd:YAG laser at 1064 nm wavelength with a pulse duration of 6 ns, repetition rate 1-10 Hz and energy fluence of 0.4-7.7 J/cm 2. Then the beam was focused through a lens of f: ... O...
Such metal masks with nano-hole opening can be used for formation of random patterns of nano-needles with sub-100 nm separation when applied to dry etching of Si. Keywords: nano-alloy; Si-Cr; Si nano-needles; sub-100 nm; nanoscale ...
This treating agent has the high adsorbing capacity of a harmful component such as the reactive gas contained in dry etching waste gas and its time before reaching a breakpoint is prolonged when said treating agent is allowed to pack an exhaust gas treating tower to treat exhaust gas. 展开 ...
The etching is carried out in the laboratory thermostatic bath for 1 h in 6.25 M NaOH solution at a temperature of 98 °C. Etched TAS- TRAK detectors are subsequently rinsed in demineral- ized water and neutralized in a 2% solution of glacial acetic acid for 30 min and again rinsed in ...
deep, vibrant rose color. Has a surprising amount of body for a rosé wine, and beautiful aromas of fresh, ripe strawberries. Very soft, yet full on the palate with flavors of wild strawberries and young cherries that come rushing in, accompanied by some spice notes and a clean, dry finis...
For the electrolytic etching process, a reaction cell containing concentrated HNO3 as the liquid electrolyte was utilized. The cell consisted of two electrodes: an anode and a cathode. The sample, which was to be etched, was connected as the anode, while a stainless-steel cathode was employed ...
The present invention during the etching process for forming a storage node of the cylinder structure, picture that is used as an etch mask even if the resist pattern is exposed to a plasma etching apparatus for a long time, is to prevent the deformation of the photoresist. Method for manufa...