GEM-compliant online software High-Resolution i-line Stepper for ≤ 200 mm Wafer Fabrication FPA-3030i5+ [30i5+] Steppers deliver performance and flexibility required for manufacturing and R&D environments and support a variety of substrates including GaAs, GaN and transparent sapphire and SiC...
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Canon FPA-3030I5A或其它型号stepper Manual
Canon FPA-3030I5A或其它型号stepper Manual
佳能在2021年3月出货新式i线步进式光刻机“FPA-3030i5a”,可以对硅基以及SiC(碳化硅)和GaN(氮化镓)等化合物半导体晶圆,从而实现多种半导体器件的生产制造。。 2021年,Canon面板(FPD)用光刻机出货67台,较2020年出货量增加35台。 二、其他公司情况 其他光刻机、电子束曝光机、激光直写设备厂商还包括上海微电子、...
Canon FPA-3030I5A或其它型号stepper Manual