版图中silicided block layer的作用 (转载) tsmc的RPO层(第34层)或umc的SAB层(第29层),在画poly resistor和ESD时都用到了,这一层有什么作用,增大电阻率吗?在工艺上是怎样实现的呢? RPO其实只是一个用在光刻的掩膜,它的作用是在做完POLY以后,再做 salicide 的时候,将有RPO的地方档主,这样有RPO的地方就不...
A method is disclosed for forming silicided gate electrodes and unsilicided poly resistors. After patterning a semiconductor material for the gate electrode and resistor structures, a first dielectric layer is used to protect a poly resistor that is not to be silicided, then a first silicid...
The test pattern in accordance with the present invention includes: a silicon substrate having an active region and a field region; a first pattern composed of a cross resistor pattern of a polycide layer formed on the field region; and a second pattern composed of polycide layer and a ...
After patterning a semiconductor material for the gate electrode and resistorstructures, a first dielectric layer is used to protect a poly resistor that is not to be silicided,then a first silicidation is performed for partially siliciding the gate electrode of thetransistor. If the gate ...
A method is disclosed for forming silicided gate electrodes and unsilicided poly resistors. After patterning a semiconductor material for the gate electrode and resistor structures, a first dielectric layer is used to protect a poly resistor that is not to be silicided, then a first silicid...
A method is disclosed for forming silicided gate electrodes and unsilicided poly resistors. After patterning a semiconductor material for the gate electrode and resistor structures, a first dielectric layer is used to protect a poly resistor that is not to be silicided, then a first silicid...
In making a polysilicon resistor in a polycide line, a thick oxide is established selectively to shield lightly doped polysilicon first from heavy doping and then from the silicide. Before adding silicide, a selected region of polysilicon broader than and including the site of the poly resistor ...
tsmc的RPO层(第34层)或umc的SAB层(第29层),在画poly resistor和ESD时都用到了,这一层有什么作用,增大电阻率吗?在工艺上是怎样实现的呢? RPO其实只是一个用在光刻的掩膜,它的作用是在做完POLY以后,再做 salicide 的时候,将有RPO的地方档主,这样有RPO的地方就不会有硅化物形成,这样保持了POLY较高的电阻率...
A method is disclosed for forming silicided gate electrodes and unsilicided poly resistors. After patterning a semiconductor material for the gate electrode and resistor structures, a first dielectric layer is used to protect a poly resistor that is not to be silicided, then a first silicid...
tsmc的RPO层(第34层)或umc的SAB层(第29层),在画poly resistor和ESD时都用到了,这一层有什么作用,增大电阻率吗?在工艺上是怎样实现的呢? RPO其实只是一个用在光刻的掩膜,它的作用是在做完POLY以后,再做 salicide 的时候,将有RPO的地方档主,这样有RPO的地方就不会有硅化物形成,这样保持了POLY较高的电阻率...