DC sputtering RF Sputter DepositionPhys, P E S
关键词: electrical resistivity sputtered coatings tungsten compounds DC sputtering RF sputtering WN resistivity sheet resistivity tungsten nitride thin film Argon 会议名称: International Conference on Properties & Applications of Dielectric Materials 会议时间: 1997/01/01 主办单位: IEEE ...
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We report a simple and mass-scalable approach for thin MoS2films via RF sputtering combined with the post-deposition annealing process. We have prepared as-sputtered film using a MoS2target in the sputtering system. The as-sputtered film was subjected to post-deposition annealing to improve crystal...
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The TiO2 is then deposited by RF plasma sputtering (with a nominal thickness of 8 nm) using the same pattern as for the metal deposition. Then, a lift-off process is carried out to complete the bottom contact and the insulating layer of the device. To continue, the 2D Te flake is ...
Structural, surface morphological and optical properties of nanocrystalline Cu2O films prepared by RF magnetron sputtering: substrate bias effect Uthanna," Structural, surface morphological and optical properties of nanocrystalline Cu2O films prepared by RF magnetron sputtering: substrate bias effect", ... ...
Power configurationQuantityDC power supply×2 RF power supply ×1Max output powerDC 500 W, RF 300W Other parametersSupply voltageAC220V,50HzOverall size600mm×650mm×1280mm Total power3.5KWTotal WeightAbout 300kg Three targets magnetron sputtering ...
Epitaxial lead zirconium titanate (PZT) (001) thin films with a Pt bottom electrode were deposited by rf sputtering onto Si(001) single crystal substrates with a Ag buffer layer. Both PZT(20/80) and PZT(53/47) samples were shown to consist of a single perovskite phase and to have the ...
www.nature.com/scientificreports OPEN Large-area, continuous and high electrical performances of bilayer received: 24 February 2016 accepted: 11 July 2016 Published: 05 August 2016 to few layers MoS2 fabricated by RF sputtering via post-deposition annealing method Sajjad Hussain1,2, Jai Singh3...