后烘,post exposure... ... ) After-baking 后期烘烤 ) post-exposure bake 曝光后烘焙 ) Post-exposure bake model 后烘模型 ... www.dictall.com|基于1 个网页 2. 后烤 被顶盖膜吸收的水滴会在进行曝后烤(post-exposure bake)时局部性地改变受热状态,就如同水在晶圆背面的作用一样,或在顶盖膜底 …...
网络曝光后烘烤 网络释义 1. 曝光后烘烤 其中前烘(postapply bake,PAB)、曝光后烘烤(postexposure bake,PEB)和显影是三个重要环节,每一步的工艺控制都能不 … www.dzsc.com|基于6个网页
中文:后烘;英文:post exposure bake的原理;中文:后烘;英文:post exposure bake的定义;中文:后烘;英文:post exposure bake是什么。对显影后的光刻胶光栅在特定温度条件下进行烘焙的过程。后烘可去除光栅基底上残余的显影溶剂,改善掩模与光栅基底的黏附能力,同时
曝光后烘是以一定温度烘烤曝光后的硅片,目的是降低驻波效应的影响以及使化学反应更充分[1]。 在曝光过程中,在曝光区与非曝光区边界将会出现驻波效应,驻波效应将会在两个区域的边界附近形成强弱相间的过渡区,这将影响显影后形成的图形尺寸和分辨率。为了降低驻波效应的影响,在曝光后需要进行烘焙,称为曝光后烘烤[2]。
Twitter Google Share on Facebook PEB (redirected fromPost Exposure Bake) Category filter: AcronymDefinition PEBPre-Engineered Building PEBPhysical Evaluation Board(US DoD) PEBPost Exposure Bake PEBProgram Editor Bottom Overflow File PEBPmc Extension Board ...
Photoresist formulations include the polymers, a photoacid generator and a casting solvent. Methods of patterning photoresist films formed from the photoresist formulations are characterized by post-exposure bakes at temperatures of about 60 DEG C or less.D·L·戈尔德法尔布...
Systems and methods for processing wafers, a combined post expose bake and chill unit, and an interface are disclosed. An exemplary system includes a lithography tool, local track, transfer device, transfer device handler, interface unit, and controller to schedule processing. An exemplary combined ...
3) postdevelopment bake 显影后烘烤4) postexposure bake 曝光后烘烤5) bake [英][beɪk] [美][bek] 烘烤1. The fragrance from baked egg is important in increasing the quality of egg,which is absent in the bitterned egg,one of the more popular traditional egg products. 鸡蛋是自然界...
1) Post-exposure bake model 后烘模型2) Pre-baking model 前烘模型3) post exposure baking(PEB) 后烘 例句>> 4) roasting mould 烘模5) the model after mining 采后模型6) afterbodies 后体模型 1. In oreder to investigate the characters of shape of ventilated supercavity and form drag...
6) postdevelopment bake 显影后烘烤补充资料:烘焙粉 烘焙粉 就是泡打粉 泡打粉又称『速发粉』或『泡大粉』或『蛋糕发粉』,简称b.p,是西点膨大剂的一种,经常用于蛋糕及西饼的制作。 泡打粉它是由苏打粉配合其它酸性材料,并以玉米粉为填充剂的白色粉末。泡打粉在接触水份,酸性及碱性粉末同时溶于水中而起反应,...