后烘,post exposure... ... ) After-baking 后期烘烤 ) post-exposure bake 曝光后烘焙 ) Post-exposure bake model 后烘模型 ... www.dictall.com|基于1 个网页 2. 后烤 被顶盖膜吸收的水滴会在进行曝后烤(post-exposure bake)时局部性地改变受热状态,就如同水在晶圆背面的作用一样,或在顶盖膜底 …...
中文:后烘;英文:post exposure bake的原理;中文:后烘;英文:post exposure bake的定义;中文:后烘;英文:post exposure bake是什么。对显影后的光刻胶光栅在特定温度条件下进行烘焙的过程。后烘可去除光栅基底上残余的显影溶剂,改善掩模与光栅基底的黏附能力,同时
网络曝光后烘烤 网络释义 1. 曝光后烘烤 其中前烘(postapply bake,PAB)、曝光后烘烤(postexposure bake,PEB)和显影是三个重要环节,每一步的工艺控制都能不 … www.dzsc.com|基于6个网页
曝光后烘是以一定温度烘烤曝光后的硅片,目的是降低驻波效应的影响以及使化学反应更充分[1]。 在曝光过程中,在曝光区与非曝光区边界将会出现驻波效应,驻波效应将会在两个区域的边界附近形成强弱相间的过渡区,这将影响显影后形成的图形尺寸和分辨率。为了降低驻波效应的影响,在曝光后需要进行烘焙,称为曝光后烘烤[2]。
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In 193nm lithography, it is well known that Critical Dimension Uniformity (CDU) within wafer is especially influenced by temperature variation during Post Exposure Bake (PEB) process. This temperature variation has been considered to be caused by the hot plate unit, and improvement of te...
4) postexposure bake 曝光后烘烤5) bake [英][beɪk] [美][bek] 烘烤1. The fragrance from baked egg is important in increasing the quality of egg,which is absent in the bitterned egg,one of the more popular traditional egg products. 鸡蛋是自然界中营养成分最为完善的动物性食品之一,...
1) postexposure bake 曝光后烘烤2) post-exposure bake 曝光后烘焙3) post exposure baking 后烘烤4) After-baking 后期烘烤5) Post exposure pre development bake 曝光後显影前之烘烤处理6) postdevelopment bake 显影后烘烤补充资料:烘焙粉 烘焙粉 就是泡打粉 泡打粉又称『速发粉』或『泡大粉』或『...
Systems and methods for processing wafers, a combined post expose bake and chill unit, and an interface are disclosed. An exemplary system includes a lithography tool, local track, transfer device, transfer device handler, interface unit, and controller to schedule processing. An exemplary combined ...
1) Post-exposure bake model 后烘模型2) Pre-baking model 前烘模型3) post exposure baking(PEB) 后烘 例句>> 4) roasting mould 烘模5) the model after mining 采后模型6) afterbodies 后体模型 1. In oreder to investigate the characters of shape of ventilated supercavity and form drag...