The invention provides a low dielectric material. The low dielectric material comprises: (i) 5-50 parts by weight of polyphenylene ether (PPE) resin having a Mw of 10007000, a Mn of 1000-4000 and Mw/Mn=1.0-1.8; and (ii) 10-90 parts by weight of liquid crystal polymer with allyl ...
This technology is known as ‘damascene’ because Cu lines embedded in dielectric resemble damascene decoration. In the last step of the process, the dielectric must withstand mechanical stresses during the Cu removal polish. Low-k dielectric materials must also be able to survive stresses induced ...
Fig 8. Relative dielectric constant (k value) as a function of porosity for different dielectrics. The difference between materials diminishes with increasing porosity. State-of-the-art integration of low-k materials in semiconductor processing is indicated by the shaded area. Compared to SiO2, low...
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Low-Dielectric Constant Materials III 作者:Kikkawa, Takeo 编 页数:300 定价:$ 74.58 ISBN:9781558993808 豆瓣评分 目前无人评价 我要写书评 Low-Dielectric Constant Materials III的书评 ···(全部 0 条) + 加入购书单 在哪儿借这本书· ··· 上海图书馆...
出版社: Materials Research Society页数: 203定价: $ 81.36装帧: 精装ISBN: 9781558993471豆瓣评分 目前无人评价 评价: 写笔记 写书评 加入购书单 分享到 推荐 我来说两句 短评 ··· 热门 还没人写过短评呢 我要写书评 Low-Dielectric Constant Materials II的书评 ··· ( 全部0 条 ) 论坛 ··...
Moreover, the preparation technology, various properties and applications of common low-dielectric polymers are discussed. Based on the desired properties and requirements for applications as low dielectric materials, the possibility of further development of porous polymer materials is discussed....
Ultra low-k dielectric materials
Novel low dielectric constant materials for use as dielectric in the dual damascene process are provided. A low dielectric constant material dielectric layer is formed by reacting a nitrogen-containing precursor and a substituted organosilane in a plasma-enhanced chemical deposition chamber. Also, novel...
(2002), PTFE nanoemulsions as ultralow-k dielectric materials. Macromol. Symp., 179: 347–358. doi: 10.1002/1521-3900(200203)179:1<347::AID-MASY347>3.0.CO;2-C Author Information 1 Laboratorio TASC-INFM SS 14, Km 163,5 Basovizza I-34012 Trieste Italy 2 Ausimont S.p.A., p.le ...