1. Introduction The search for high dielectric constant (high-k) gate dielectric materials for ?eld-effect transistor-enabled (FET) applications has stimulated important research activities in both conventional and unconventional electronics. Although it is not the focus of this Review Article, high-k...
We report recent and ongoing theoretical studies of the dielectric properties of high-dielectric-constant oxides comprising transition metal and rare earth cations Results and trends are discussed for crystal and amorphous phases derived from two main structural classes: bixbyite, typical of X2O{sub}3...
Journal of Materials ChemistryLu J, Moon KS, Wong CP. Silver/polymer nanocomposite as a high-k polymer matrix for dielectric composites with improved ... J Lu,Moon, Kyoung-Sik,CP Wong - 《Journal of Materials Chemistry》 被引量: 101发表: 2008年 Low dielectric constant organic dielectrics bas...
高K介质 (High-k Dielectric)和替代金属栅 (RMG)工艺 2007年,Intel公司宣布在 45nm CMOS 工艺节点上成功地使用高k氧化铪基(Hf-oxide Based)介质和金属栅工艺,可以显著减少栅介质泄漏电流和增加栅导电能力。 但高k氧化铪基栅介质较易被源漏退火步骤的热过程引起结晶化,导致较大的泄漏电流,因此高k介质金属栅模块...
AtomiclayerdepositionWhentheLa/(La+Hf)atomicpercentratiowas49.1%,thegrowthrateoftheLHOfilmwas0.5Å/cycle,with High-koxideadielectricconstantof16.3.AstheLaconcentrationwasincreased,thedielectricconstantdecreased.In addition,wefoundthataLa-hydratephase(La–O–H)canbeeasilyformedwhentheLa/(La+Hf)isover...
A dielectric material having a high dielectric constant includes a Group III metal oxide and a Group V element. The incorporation of the Group V element in the Group III
(EMAILWIRE.COM, April 27, 2019 ) High-k dielectric material is defined as the material which has high dielectric constant k. These materials are principal insulators where negligible current flows from the material during the application of voltage through it. The growi...
High dielectric constant of (Ba 0.96 Ca 0.04 )(Ti 0.85 Zr 0.15 )O 3 multilayer ceramic capacitors with Cu doped Ni electrodes[J] . Ying-Chieh Lee,... YC Lee,CS Chiang - Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics...
Single-crystalline van der Waals layered dielectric with high dielectric constant. Nat. Mater. 22, 832–837 (2023). Google Scholar Lanza, M. et al. Yield, variability, reliability, and stability of two-dimensional materials based solid-state electronic devices. Nat. Commun. 11, 5689 (2020)...
United States Patent US7456064 Note: If you have problems viewing the PDF, please make sure you have the latest version of Adobe Acrobat. Back to full textHome Search Services Contact us © 2004-2024 FreePatentsOnline.com. All rights reserved. Privacy Policy & Terms of Use....