canbeadaptedtolarge—areacoating.DCmagnetron sputteringdepositioncanfurtherprovidefastdepo— sitionrateatlowdepositiontemperaturecompared withRFsputtering. Comparedwithrigidsubstrates、researchershave attemptedtodeposit t ran sp arent con d uct in g IT O ...
Hence, the major objective of this work is to extend the life and quality of the cutting tool by improving its hardness and wear resistance by using DC Magnetron Sputtering to coat a 1渭m thin film layer of Tungsten carbide on High speed steel insert. This insert is to be characterized ...
直流反应磁控溅射al,n共掺方法生长p型zno薄膜及其特性 preparation and characteristics of p-type zno films using al and n codoping method by dc reactive magnetron sputtering 文档格式: .pdf 文档大小: 270.71K 文档页数: 6页 顶/踩数: 0/0
Atomic force microscopy(AFM)and X-ray diffraction(XRD)investigations ofcopper thin films prepared by dc magnetron sputteringtechnique. Chan Kah-Yoong,Teo Bee-San. Microelectronics Journal . 2006Chan KY, Teo BS (2006) Atomic force microscopy (AFM) and x-ray diffraction (XRD) investigations of ...
TFTs with ZrInO channel layers were fabricated with bottom-gate structure, as shown inFig. 1(a). A layer of 300-nm-thick Al-Nd alloy was deposited on a glass substrate by DC magnetron sputtering and patterned by wet etch. Then, a layer of Nd:Al2O3was prepared by an anodization proc...
Influence of temperature on the microstructure of V2O5 film prepared by DC magnetron sputtering
PDF/EPUB Tools Share Cite Recommend Abstract Molybdenum nitride films γ-Mo2N/Si have been fabricated with reactive magnetron sputtering in (N2 + Ar) gas mixture. Phase composition of the films has been defined with reflection high energy electron diffraction. Refractive index and extinction ...
In this paper, we present the dimensional effects observed for TiO2 films deposited by DC circular magnetron sputtering. TiO2 thin films are deposited in an Al–TiO2–Al structure to investigate their non-linear characteristics, from which the carrier effective mass and the barrier potential at the...
Keywords:transparentcOnductiveOxidesthinfilms;magnetrOnsputtering;Zn :Althinfilms;sheetresis- tance;fOrbiddenbands;infraredemissivity 透明导电氧化物(TC )薄膜具有可见光区高 透过、禁带宽度较大(>3eV)以及在红外光区高 反射率等优良的光电特性,已在太阳能电池、液晶 显示器、热反射镜和建筑玻璃节能涂层等诸多领 ...
Design and magnetron sputtering of nanomultilayered W2N/ag-SiNx films: microstructural insights and optimized self-lubricant properties from room temperature to 500°C Ceram. Int., 50 (2024), pp. 39226-39234 View PDFView articleView in ScopusGoogle Scholar [23] D. Javdošňák, J. Musil, ...