In a sputtering cathode on the magnetron principle with a target consisting of at least one piece and composed of the material to be sputtered, there is disposed in back of the target a magnet system having a plurality of magnet units of alternately different polarity. These form at least ...
Sputtering cathode according to the magnetron principleThe deposition cathode operates to a magnetron principle and has at least a sputter target (3) of deposition material. Behind this is a magnet system with a source of different polarity. This has permanent magnets (2a,2b) as well as a ...
英文: Abstract: On the basis of some principle trouble of coating glass, the application principle of magnetron sputtering, selection of target material are introduced, enhancement of the coating quality, application of the coated glass and development prospect中文: 文摘:本文在探讨镀膜玻璃一些基本问题...
First principle calculation was introduced to investigate the evolution mechanism of bond and phase by Nb doping and instruct the coating design. Then, a series of Nb-doped a-C samples were deposited by closed field unbalanced magnetron sputtering ion plating (CFUBMSIP) method. The microstructure ...
have investigated the effect of annealing temperature on the optical and electrical properties of cubic MgZnO films grown by RF magnetron sputtering [76]. In a theoretical study, Degheidy et al. have investigated theoretically the influence of composition, temperature and pressure on the optoelectronic...
energyofsolarradiationandtransfersheattothemedium.It isaspecialheatexchanger.Theheatexchangerinthecollector carriesoutheatexchangewiththedistantsun.Flatplatesolar collectorisakindofsolarcollector.Theutilitymodelis composedofaheatabsorbingplatecore,ashell,atransparent ...
Nb films were deposited using a biased target sputtering instrument by 4Wave Inc. The Nb target used was of 99.99 wt% purity. A square pulse form was used for the application of −700 V target bias voltage for the deposition, with a cycle frequency of 10 kHz (100 μs per cycle) and...
In a sputtering cathode on the magnetron principle with a target consisting of at least one piece and composed of the material to be sputtered, there is disposed in back of the target a magnet system having a plurality of magnet units of alternately different polarity. These form at least ...
Sputtering cathode according to the magnetron principle
Brashilia not only prepared the TiAlN/TiAlON/Si3N4 coating [18] by DC reactive magnetron sputtering but also optimized the TiAlN/AlON coating [19] and the HfOx/Mo/HfO2 coating [20]. Wang developed the first high-temperature spectral selective absorption coating of the Nb–NbN system [21]....