nanoimprint lithographythreeヾimensional nanostructuresnanocomposite polymersphotonic polymeric componentsnanometrologySet up the foundations of thermal conductivity in disordered 2D materialsdoi:10.1002/9783527628155.nanotech097Vincent ReboudCatalan Institute of Nanotechnology (ICN〤IN2) Phononic and Photonic ...
59 However, nanoimprint lithography (NIL) offers a promising alternative, generating nanoscale patterns at a low cost and high throughput. Nanoscale structures are built using two standard methods in modern materials fabrication: top-down and bottom-up.60 Top-down techniques involve conventional tools ...
select article Reshapable bio-based thiol-ene vitrimers for nanoimprint lithography: Advanced covalent adaptability for tunable surface properties Research articleAbstract only Reshapable bio-based thiol-ene vitrimers for nanoimprint lithography: Advanced covalent adaptability for tunable surface properties ...
Nanostencil lithography (NSL) based on shadow-masked patterning of the nanostructure [28], nanoimprint lithography that creates nanopatterns by the mechanical deformation of imprint resist [29], and interference lithography where an interference pattern is recorded in a photoresist material [30] are ...
et al. Scalable nanoimprint lithography process for manufacturing visible metasurfaces composed of high aspect ratio TiO2 meta-atoms. ACS Photon. 8, 2400–2409 (2021). Google Scholar Metalenz and STMicroelectronics deliver world’s first optical metasurface technology for consumer electronics devices. ...
The top–down approaches typically employ techniques such as X-ray electron beam lithography and nanoimprint lithography8–10. Bottom–up techniques, such as self- assembly, chemical synthesis or super-molecule techniques11,12, are driven by the tendency of physical systems to minimize their ...
Porous light-emitting diodes with patterned sapphire substrates realized by high-voltage self-growth and soft UV nanoimprint processes. J Lightwave Technol. 2013;32(2):326–32. Article Google Scholar Kissinger S, et al. Enhancement in emission angle of the blue LED chip fabricated on lens ...
Park, J.-S. et al. All-glass, large metalens at visible wavelength using deep-ultraviolet projection lithography.Nano Lett.19, 8673–8682 (2019). ArticleGoogle Scholar Kim, J. et al. Scalable manufacturing of high-index atomic layer–polymer hybrid metasurfaces for metaphotonics in the visible...
Nanoimprint lithography This method is used for manufacturing nanostructures on thermally cured resists via mold imprinting. The process can be described as follows: coating a resist on the substrate, pressing the mold on the resist, increasing the temperature or irradiating UV light to solidify it,...
Lithography is a key patterning technique used to machine or directly write small features on materials like silicon and PMMA, with nanometric levels of surface roughness and profile accuracy. As such, processes such as nanoimprint lithography are used to directly fabricate master molds for various ap...