A roller type mold is used to continuously imprint nanostructures onto a flexible web or a rigid substrate. The process includes a coating and an imprinting module, which rotate the web synchronously. Liquid resist materials are used for imprinting and the patterns are set by thermal or UV ...
As in the roll-to-roll process, a synthetic resin cured by UV light serves as an intermediate layer for the lithographic imprint of the nanostructures in the R2P NIL process. UV-Nanoimprint temicon specifically uses the UV nanoimprint lithography (UV-NIL) process. For this, a UV-curing poly...
Roll to roll nanoimprint lithography US8027086 * 2008年4月9日 2011年9月27日 The Regents Of The University Of Michigan Roll to roll nanoimprint lithographyUS8027086 * Apr 9, 2008 Sep 27, 2011 The Regents Of The University Of Michigan Roll to roll nanoimprint ... GUO, Lingjie Jay,AHN, Se...
Ahn S H,Guo L J.High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis.Proceedings of SPIE the International Society for Optical Engineering. 2009Se Hyun Ahn & Jay Guo L., 2007. High-Speed Roll-to-Roll Nanoimprint Lithography on Flexible Plastic ...
"While roll-to-roll nanoimprint lithography holds much promise in enabling a variety of new applications, previous efforts to develop the technology lacked a holistic approach," stated Professor Andy Hor Tzi Sum, executive director of IMRE. "As part of this new ICON project, IMRE is bringing to...
High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates. Adv. Mater. 20, 2044–2049 (2008). Article CAS Google Scholar Yerushalmi, R., Jacobson, Z. A., Ho, J. C., Fan, Z. & Javey, A. Large scale, highly ordered assembly of nanowire parallel arrays by ...
In summation, the drop-casting method was confirmed for thin-film coating on a cylinder that can be further used as an imprint mold in roll-to-roll nanoimprint lithography. Acknowledgement This work was supported by the Technology Innovation Program (N0002310) funded by the Ministry of Trade, ...
J. High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates. Adv. Mater. 20, 2044–2049 (2008). 14. Kina, O., Koutake, M., Matsuoka K. & Yase, K. Organic thin-film transistors fabricated by microcontact printing. Jpn. J. Appl. Phys. 49, 01AB07 (2010). 15. ...
We demonstrate the continuous fabrication of large-area flexible metamaterial films via roll-to-roll (R2R) nanoimprint lithography (NIL) technique that can be conducted in an ambient environment at high speed. The plasmonic metal-insulator-metal structure is successfully fabricated by R2R NIL to con...
The key process parameters of UV roll-to-roll nanoimprint lithography are identified from an analysis of the fluid, curing, and peeling dynamics. The proce... A Jain,RT Bonnecaze - 《Journal of Applied Physics》 被引量: 22发表: 2013年 ...