由美国CyberOptics公司提供的WaferSense®与ReticleSense®无线量测技术,被半导体制造公司和OEM设备制造商所广泛使用;作为全球半导体无线量测的领导厂商,CyberOptics提供腔体间隙、振动、水平、中心对位、污染颗粒度、湿度等各种功能的无线量测工具,提供的高精度、高重复性的图形化与数据化量测,帮助半导体制造提升工艺良率...
MSP, a Division of TSI, supplies wafer contamination standards and reticle contamination standards in the semiconductor industry for consistent and repeatable particle size and count control.MSP provides certified standards for wafer and reticle inspection tools for developing, qualifying, calibrating, and ...
MSP, a Division of TSI, supplies wafer contamination standards and reticle contamination standards in the semiconductor industry for consistent and repeatable particle size and count control.MSP provides certified standards for wafer and reticle inspection tools for developing, qualifying, calibrating, and ...
Certified for wafer and reticle inspection tools, MSP's contamination standards support development, qualification, calibration, and monitoring of inspection systems. They are compatible with various substrates including wafers and reticles of different sizes, used across semiconductor fabs for equipment qual...
华为计算2030提到2.5D芯片封装传统芯片受wafer(硅片)曝光尺寸限制 (1 Reticle:25mm*32mm),芯片Die的尺寸 及Die良率提升受到严重技术瓶颈,直接制约芯片整体性能提升及芯片成本降低。2.5D 技术可以有效提升Die良率、降低芯片成本,堆叠集成实现更大规模芯片性能,且对于不同
A reticle is used to pattern each die. The pattern on the reticle forms a primary die and test structures in scribelines that abut edges of the die. A reticle can be used to form additional test structures that are separated from the primary die. A gap is formed between the additional ...
4、固定间隔失效1:一般情况下,固定间隔位置是一个reticle的大小。大概率是mask固定位置受到污染,或图形缺失,导致固定位置die图形异常。一般情况下,good die可以正常封装。但也需要先确认mask的具体情况,确认受污染区域旁边区域是否也有轻微污染,以防止,轻微图形变形的die被测试成good die,因为这类die可能存在早夭风险。
EUV-Reticle-Handling Wafer Gripper, 100 to 450 mm Gripper system for automated handling of single wafers in various sizes Wafer Gripper, 100 to 450 mm Carrier Gripper Automated carrier handling system enables handling on existing tools Carrier Gripper ...
Wafer Handling System Atmospheric Robot Vacuum Wafer Robot Aligner Load Port Vacuum Platform EFEM/SORTER Stocker Mask/Reticle Handling System Life science automation products Software Solution SystemIntegration Service Package Service Control Device Controller ...
Photomask Reticle Cleaning System Non-Contact Wafer Handling Benefits of Automated Wafer handling Whether you’re transitioning from manual wafer handling or looking to integrate automation with your process tool – we have the experience to provide a solution that meets your needs. ...