A new photoresist stable to 500°C has been developed. The addition of potassium dichromate to a polyamic acid, believed to be the condensation product of pyromellitic dianhydride and 4,4′-diaminodiphenylether, results in a photosensitive polymer which can be cast or spun. The resultant film ...
Adhesion of the imaging and auxiliary layers to a polymer film support has traditionally been achieved through the use of suitable adhesion or tie layers referred to as a subbing system. Such a subbing system generally involves chemical treatment of the polymer surface with an etch or "bite" ...
The preferred photoactive compound suitable for a positive photoresist composition responsive to deep UV actinic radiation has the formula 18-8 in Table I. The present invention also contemplates photosensitive elements and thermally stable photochemically imaged systems based on the actinic light sensitive...
occurs when etching removes the portion of the top layers of semiconductor wafer not covered by the photoresist. The chemistry of photoresists is such that the photoresist remains substantially intact and resists removal by chemical etching solutions while the portion of the top layers of the semicon...
As described in the following, devices can be destructed through the shrinkage of the polymer substrate upon thermal triggering. Specifically, the device is constructed with an ultra-thin functional components and electronics supported by an electrospun poly(ε-caprolactone) (PCL) nanofibrous polymer ...
The present invention discloses particular lithographic polymeric materials and methods of using these materials, wherein the polymeric materials have acid labile or photolabile groups pendant to the polymer backbone. The polymeric materials are sufficiently transparent to deep UV radiation to permit deep ...
THERMALLY STABLE PHOTORESIST COMPOSITIONThe photoresist compsn. comprises (a) 10-70 wt.% of photoactivating component, (b) 30-90 wt.% of binder resin and condsn. polymer of formaldehyde and phenolic monomer of formula (I), (II) or (III), and (c) a mixed solvent of ethyl lactate/...
Similarly, if polymer NF are produced from a drug containing solution, controlled drug release systems can be obtained [4]. Nanofibres of biodegradable polymers such as PL and PG are of particular interest for tissue engineering scaffolds, as they will completely dissolve after implantation thus ...
The images are formed from a dual acting, aqueous developable, crosslinkable polymer coating which is itself formed from a thermally stable, photosensitive coating composition comprising acid hardening resin system and photoacid generator dissolved in solvent. The coating compositions may also be used to...
A method of forming a thermally stable organosilicon polymer includes: (i) depositing an organosilicon polymer whose backbone is composed of silicon atoms on a substrate using a sil