For the new Schott EAPSM Material, comprising a Ta/SiO/Cr stack, a patterning process has been developed. The material offers the advantage of an independent adjustment of phase shift and transmission and is applicable for different wavelengths. Because of very homogenous Ta and SiOfilms and perf...
Calixarene-Ta(V)-SiO2: Identification as a Site-Isolated Epoxidation Catalyst and Subsequent Use in HydrodenitrogenationJustin M. Notestein
. SiO 2 /Ta =t : 15 SiO 2 + 37 Ta = 6 Ta 2 O 5 + 5 Ta 5 Si 3 , > ÿ Q d , =NiFe (111) 8 Ta 5 < . 3 SiO 2 /Ta = X u 6 , R u =D 9 ¶ , 3 8 u R ! D eX [1] . u R P < > _ , ] ¶. , u U ] , 8 . (t [2]...
In this study, copper electrodeposition on patterned Cu/Ta(N)/SiO2 surfaces for filling sub-micron vias with a width of 300 nm and an aspect ratio of 3.4:1... WH Li,JH Ye,SFY Li - 《Journal of Applied Electrochemistry》 被引量: 74发表: 2001年 Thermal stability of copper silicide pass...
Si/SiO2/Ta/Cu薄膜的参数指标、技术参数,详细参数,仪器参数等性能指标方面的信息,合肥科晶其它物性测试仪器,Ta厚度:20-50nm (Ta diffusion barrier) Si/SiO2参数:<100> P型掺B;300nmSiO2;R:1-20ohm-cm;单抛Si/SiO2尺寸:dia 4inch x 0.525mm
摘要: 以溶胶-凝胶法和浸渍法制备V2O5/TiO2-SiO2催化荆,将其应用于甲醇与乙醇一步合成异丁醛的催化反应,并采用BET、XPD、IR测试技术对催化剂的结构进行表征,考察制备方法和焙烧温度对催化剂结构和催化性能的影响.结果表明:采用溶胶-凝胶法制备的催化剂具有较好的催化性能,适宜的焙烧温度为773 K....
硕士学位论文离子束溅射制备Ta2O5/SiO2薄膜的应力特性研究作者姓名:***教师:**林研究员樊峻棋副研究员中国科学院光电技术研究所学位类别:工学硕士学科专业:光学工程研究所:中国科学院光电技术研究所2017年3月StressPropertiesofTa2O5/SiO2CoatingsPreparedbyIonBeamSputteringByyuqiADissertation/ThesisSubmittedtoUniversity...
Cu/Ta/SiO2/Si多层膜结构是目前集成电路制造工艺中的常见结构,其硬度与弹性模量通过纳米压入技术测得。2) Si/SiO2 multi-layer films Si/SiO2多层膜 1. Si/SiO2 multi-layer films are fabricated using the RF magnetron sputtering technique, and the I-V properties of the multi-layer films are analyzed...
S. Park, "interfacial reactions and failure mechanism of Cu/Ta/SiO2/Si multilayer structure in thermal annealing", Mat. Sci. Eng., vol. B94, p. 111 (2002).Latt K M,Lee Y K,Osipowicz T,et al.Interfacial reactions and failure mechanism of Cu/Ta/SiO2/Si multilayer structure in thermal...
钽(Ta)和铌(Nb)的性质相似,因此常常共生于自然界的矿物中。一种以钽铌伴生矿(主要成分为SiO2、MnO2、Nb2O5、Ta2O5 和少量的TiO2、FeO、CaO、