尼康Nikon KrF光刻机NSR-S208D生产于2004年,分辨率≤110nm,产能达到140wph。
113894 Nikon Nikon NSR-2005i9 I-line Stepper 150 mm 01.06.1994 1 as is where is 114406 Nikon NSR-S208D DUV scanner 1 inquire 111847 Nikon NSR-4425i i-Line Wide-Field Stepper 200mm 1 as is where is 112871 Nikon OPTIPHOT 200 Microscope, Bright & Dark 1 as is where is 113895 ...
Exposure field22 mm square to 17.9 (H) × 25.2 (V) mm Alignment accuracy (EGA, |M| + 3σ)≦ 70 nm Alignment systemLSA (standard), FIA (optional), LIA (optional) Metrology/Inspection Systems Automatic Macro Inspection System AMI-5600/3500/3000 MarkⅡ ...
Nikon Announces New KrF Scanner with 25% Higher Productivity System will be used for manufacturing of 110 nm or smaller devices Belmont, California – November 11, 2004 – Nikon continues its focus on high productivity lithography solutions with the introduction of the NSR-S208D, an advanced KrF...