NIKON(尼康)N..Nikon NSR S207D* Lens data : OK* It is perfect because the operating equipment was deinstalled in Ni
NIKON(尼康)NSR S207D Nikon NSR S207D * Lens data : OK * It is perfect because the operating equipment was deinstalled in Nikon head office in Japan. * It's not a global foundry product. * It is a normal equipment that can be used anywhere. 来自半导体设备吧 yqssxp77 快睡着了...
Belmont, Calif., July 8, 2003 -Nikon Corporation launched its third new system in less than a week, the NSR-S207D. Targeted at 110 nm devices that are ramping into volume production, the system is the 7th generation of Nikon’s successful KrF scanner series. The system combines a high ...
Exposure field22 mm square to 17.9 (H) × 25.2 (V) mm Alignment accuracy (EGA, |M| + 3σ)≦ 70 nm Alignment systemLSA (standard), FIA (optional), LIA (optional) Metrology/Inspection Systems Automatic Macro Inspection System AMI-5600/3500/3000 MarkⅡ ...