In dieser Konfiguration Squeeze-Film-Dämpfung wird effektiv eliminiert. Dies stellt einen Extremfall, wo die mechanische Dämpfung der MEMS Strahl ist sehr gering. Dieses Papier beschreibt, wie die EFFA MEMS dev herzustellenICES und die Messung durchführen, um experimentell zu validieren ...
sensors Article Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field Ya Mou 1, Zhanqing Yu 1,*, Kaitian Huang 2, Qing Ma 3, Rong Zeng 1,* and Zheyao Wang 3 1 State Key Lab of Power Systems, Department of Electrical Engineering, Tsinghua ...
micromachines Article MEMS Gyroscopes Based on Acoustic Sagnac Effect † Yuanyuan Yu 1, Hao Luo 2, Buyun Chen 1, Jin Tao 1, Zhihong Feng 1, Hao Zhang 1, Wenlan Guo 1 and Daihua Zhang 1,* 1 State Key Laboratory of Precision Measurement Technology and Instruments, School of Precision ...
micromachines Article Highly Integrated MEMS Magnetic Sensor Based on GMI Effect of Amorphous Wire Jiawen Chen , Jianhua Li * and Lixin Xu School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China; 13718925459@163.com (J.C.); lxxu@bit.edu.cn (L.X.) * ...
micromachines Article Design of Ensemble Stacked Auto-Encoder for Classification of Horse Gaits with MEMS Inertial Sensor Technology Jae-Neung Lee, Yeong-Hyeon Byeon and Keun-Chang Kwak * ID Department of Control and Instrumentation Engineering, Chosun University, 375 Seosuk-dong, Gwangju 501-759, ...
applied sciences Article Development of Dual-Axis MEMS Accelerometers for Machine Tools Vibration Monitoring Chih-Yung Huang * and Jian-Hao Chen Department of Mechanical Engineering, National Chin-Yi University of Technology, Taichung 41170, Taiwan; o970265160@gmail.com * Correspondence: cyhuang@ncut....
sensors Article Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films Martin Fischeneder * , Martin Oposich, Michael Schneider and Ulrich Schmid Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria; martin.oposich@aon.at (M.O.); michael.schneider@tu...
Since the 1990s, PDR technology based on inertial measurement has attracted the attention and research of many researchers [6], which has led the inertial sensor to truly serve indoor and outdoor seamless positioning. PDR systems can be divided into two categories [7]: the first is the ...
sensors Article A MEMS-Enabled Deployable Trace Chemical Sensor Based on Fast Gas-Chromatography and Quartz Enhanced Photoacousic Spectoscopy Stefano Zampolli 1 , Sandro Mengali 2,*, Nicola Liberatore 2, Ivan Elmi 1, Luca Masini 1, Michele Sanmartin 1 and Roberto Viola 2 1 Institute for ...
sensors Article A High Performance Torque Sensor for Milling Based on a Piezoresistive MEMS Strain Gauge Yafei Qin, Yulong Zhao *, Yingxue Li, You Zhao and Peng Wang The State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an ...