Flexible MEMS thermal flow sensorflow separationMicro-electro-mechanical systems (MEMS) thermal flow sensors featured with high spatial resolutions, fast frequency response and minimal interference with fluid flow have been applied widely in boundary-layer studies and aerodynamic flow sensing and control ...
肺功能设备的MEMS热式流量传感器 *** 肺功能设备的MEMS热式流量传感器 •摘要在工业国家中，心血管疾病引发了约40%的死亡，并呈现增加的趋势。睡眠的科学研究已经证明，睡眠呼吸紊乱是对引发心血管疾病的风险因素之一。因此，对患者呼吸的监控成为医疗的重要参数之一。我们提出流量传感器的发展与特殊的适应肺功能的应用...
OMRON D6T-32L-01A 板上安装温度传感器 MEMS Thermal Sensor 32 x 32 D6T-32L-01A 10000 OMRON -- ￥0.1000元1000~4999 个 ￥0.0900元5000~9999 个 ￥0.0800元>=10000 个 深圳市特维创电子科技有限公司 3年 -- 立即询价 查看电话 QQ联系 ...
Flow sensorIn recent years, the need for controlling the patients breathing over a long duration time has become more and more important. Among this application the measurements of high flow rates are asked in different fields. A new development of a micromachined thermal flow sensor is presented...
基于MEMS技术的热式质量流量传感器 斯东浩 李艳松(杭州中矽微电子机械技术有限公司310013)摘要:本文主要介绍了用MEMS技术制造的热式质量流量传感器工作的基本原理,并进行了制造工艺和性能描述以及相关领域的应用。关键词:MEMS 微机电 流量传感器 芯片ThermalMassFlowSensorBasedonTechnologyofMicroelectronicMechanicalSystems(MEMS...
Model Number:FS4008-20-06-CV;Usage:Module;Condition:Original 100%;precision:± (2.5+ 0.5FS)%;Warranty:90 Days;Accuracy:0.1%;Type:Gas Flow Sensor;Series:FS4008-20-06-CV;Mounting Type:SIP;Description:Flow sensor;Model Number:FS4008-20-06-CV;Brand Name:YJJ;
技术制造的热式质量流量传感器工作的基本原理!并进行了制 造工艺和性能描述以及相关领域的应用" 关键词! MEMS 微机电 流量传感器 芯片 ThermalMassflowSensorbasedonTechnolo gy o MicroelectronicMechanicalS y stems ( MEMS ) SiDonghaoLiYansong ( ~angzhousinomemtechnolog$CO. 9 LtD ) A stract C Thispaperintro...
design constraints withACEINNA’shigh-bandwidth, high-accuracy current sensors explore current sensors With 100’s of millions deployed,ACEINNAis nowbringing its thermalMEMSexpertise to the flow sensor market explore flow sensors Culture. Tech. Space. ...
Vertical silicon vias in the substrate ensure good thermal contact between the sensor and the airflow and the glass effectively isolates the heaters from the thermistors. The substrate was fabricated by using ...
MEMS thermal flow sensor with compensation for fluid composition The present invention provides a MEMS thermal flow sensor or meter for measuring the flow rate of a fluid without need for calibration of the flow sensor f... TO Maginnis,JP Nan,Z Zhao,... 被引量: 0发表: 2018年 A MEMS flo...