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MEMSCMOSsimulationwallshearstressoptimisationflowsensorFor the first time, 3D multiphysics finite element modelling has been used to optimise the geometry of a calorimetric thermal flow sensor. The model involves and couples three physics domains: electric, thermal and fluid mechanics. The model is ...
Electrochemical sensors, widely present in the market due to their good performance in sensitivity and selectivity, remain penalized by their size, their significant consumption, and especially, by their limited lifetime. For their part, electromechanical sensors (MicroElectroMechanical Systems (MEMS), ...