such as high-k/metal gate, the Kiyo3x provides multi-film etch capabilityin a single chamber, which results in a 50-to-100 percent productivityadvantage over a two-chamber approach.Multiple Kiyo3x systems have been installed at major customer sites inregions worldwide to address a variety of ...
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半导体晶圆设备供应商Lam Research Corporation日前发布了2300 Versys Kiy03x刻蚀设备,关键尺寸(CD)一致性达到1nm,为双重图样曝光过程所面临的CD及重叠(overlay)挑战提供了解决方案.另外,这套设备还配置有升级选项,灵活经济有效地对高k金属栅极,硬模窗口(hardmask open),浅沟槽隔离及应变硅等进行刻蚀. 关键词: 刻蚀...
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Integrated Measurement Systems 100-0091-001 Interface PCB lot of 2 working 1 Saginomiya Refcon SNE-B100Q3 Temperature Controller working 18 AMAT Applied Materials 0040-48435 300mm Upper Chamber Adapter new 1 Applied Materials AMAT Single Zone Heater 300mm Kit 0242-17788 New 1 AMAT Applied Material...
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The addition of Pulsus PLD to the Lam portfolio further expands Lam's comprehensive range of deposition, etch and single-wafer clean products focused on specialty technologies and demonstrates Lam's continuous innovation in this sector. This new deposition ...
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