LAM Research 810-800081-015 Rev. D P2 MB Motherboard VME Etch Assembly PCB Board LAM Research 810-800256-107 Rev. B Node Board PCB Control Card w/ Screen LAM Research 810-802901-300 Rev. B Motherboard Node 1 Common Control Board PCB Lam Research 810-802901-305 MB, Node 1 PM, Common...
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Dr. Thorsten Lill is VP of Emerging Etch Technologies and Systems at Lam Research. He holds a Ph.D. in Physics from the Albert-Ludwigs-University in Freiburg, Germany. In Freiburg, he studied collisions of C60 and C70 fullerenes with crystalline surfaces in ion and laser beam experiments. Af...
Lam research V3 Cleaner power distribution board 810-058546-001 rev B Lanner EM370 V2.0 mother board Laser Beam Stabilizer 3922.541.9351.1 Laser drive 8110-15P Laser Quantum Finesse V10 V1O Rev 1.30 KI0 060510 LASERVALL 1AC808LI0 Laser diode module LASERVALL 1RIVIO2002 LASOS CKL 24...
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密封Lam Research 19-053642-00 Rev. M来自:厦门翔麟奕科技有限公司5人民币发布时间:2024-9-24 关注次数:116 产品参数 商品详情 LAM 001-4967-17 END EFFECTOR ASSY LAM 036-8101-00 BELL JAR LAM 0952-0173-0001 CLAMP, BEAM WIDTH, SLIT LAM 1-80-0002-023 SENSOR,MEGEASONIC LAM 10-8886-063 ASSY...
FIG. 12A is graph of an example etch per cycle model based on a function provided in Eqn. 5B. FIG. 12B is a graph of etch per cycle as a function of argon bias in an example of low energy ALE. FIG. 13 is an example of ion energy as a function of “on” time for argon expos...
The Bosch process cyclically alternates between etch and deposition steps enabling deep structures to be defined into a masked silicon substrate. Upon energetic and directional ion bombardment, which is present in the etching steps, any polymer film coated in the bottoms of etched structures from the...