TCP 9600 SE 设备详细信息 模型描述 ID:9226415 晶圆大小:8" Metal etcher, 8" Gas box MFC Temperature controller Process kit: EPD Sensor Chuck type: Mechanical (12) Board checkers MKS: 13.32 PA P/C ESC VAT Valve SBC Board type: BOSS Video board type: Floppy disk VME Type: Hard disk contr...
LAM TCP 9600SE Details SDI ID:34434 Manufacturer:LAM Model:TCP 9600SE Description:Metal Etcher Version: Vintage: Quantity:1 Sales Condition: Ask SDI fabsurplus.com! If you are looking for a specific piece of semiconductor equipmentlet us know what type of semiconductor manufacturing equipment you...
ETCH Chamber following init ial wipe wit h Ult raSOLV ® Sponge .foamtecintlwcc This Document For Reference Only LAM 9600 METAL ETCH SUPER CLEAN PM PROCEDURE ( CONT’ D) : lam 9600 metal etch super clean 2a pm 102510.docx 4 Fi g 4: Loaded Diamond ScrubPAD St ep 7: To help unload...
LAM 9600 SE - Metal Etcher LAM TCP9600SE/SN4305 LAM Rainbow 4420 LAM 4420 - Polysilicon Etcher Lam Research Single Wafer Shallow Trench Etcher Lam Research Rainbow 4728B Plasma Etcher Dry Etcher RIE Used Equipment(SN:2737) Lam Research Rainbow 4528B Plasma Etcher Dry Etcher RIE Used Equipment...
In this case, the magnitude of the charging is determined primarily by the absolute plasma density, the electron temperature and the aspect ratio of the structures on the wafer.A new metal etching system, the TCP 9600PTX, has recently been introduced by Lam Research Corp oration. This paper ...
Lam Research 852-030038-601 Lower Reaction Chamber TCP LAM 9600SE Used Working Lam Research 853-001142-001 Automatch Controller Lam Research 853-012350-002 Outer Gate Assembly Rev. H 4420 Etcher Used Working Lam Research 853-012350-002--230D Outer Gate Assembly 4420 Etcher Used Working ...
Equipment DetailsMetal etcher, 12"Install Type: Stand-AloneApplication: M1/M2 Al EtchSystem Software (ver.): 1.7.2sp2HF4-CST-5Chambers: (2) Metal Etch CH + (2) Ash/Strip CHFactory Interface/Automation:Interface: (3) Carrier Stage (continuous flow operation)Brooks 300mm Load-Ports25-Slot...
Lam Research 490 / 590 ETCHER POWER DRIVER MOTOR PCB 810-000474-001 Lam Research 810-800081-013 P2 MB VME PCB Lam Research HLM DP Breakout BD Board 810-022798-002 FAB710-022798-001 Lam Research Node Board 24 Channel Temperature Control 810-028295 Lam Research 0603-0158-12-B Shower ...
LAM RESEARCH SSMC-LAM 9600 METAL-22 715-330889-002 Ground ring Lam research V3 Cleaner power distribution board 810-058546-001 rev B Lanner EM370 V2.0 mother board Laser Beam Stabilizer 3922.541.9351.1 Laser drive 8110-15P Laser Quantum Finesse V10 V1O Rev 1.30 KI0 060510 LASERVALL...
Greg Campbell, vice president and general manager of Lam's Etch Products organization, said in a statement, “The TCP 9600PTX system has been qualified at multiple customer sites for 0.18-micron aluminum etch, and we have demonstrated 0.13-micron capability.” The etcher is said to have a th...