halftonemask，主要是通过特定区域的部分透光特性曝光形成两种不同的膜厚，通过控制光罩基板上不同区域的铬膜的厚度，来控制不同区域的透光度。halftonemask这种光光罩的设计和制作工艺要求都比较高，且残膜区的光阻的膜厚的均一性较低，所以容易产生破膜现象。由于曝光和药液扩散作用，残膜中间会先破膜，...
HALFTONE MASK
1) halftone mask 半色调掩膜1. Diffraction and interference phenomenon in the halftone mask fine pattern forming process was analyzed. 针对使用半色调掩膜技术的TFT LCD玻璃基板曝光过程中的衍射和干涉现象进行了分析。2) gray tone mask 灰色调掩膜...
Kind Code: A1 A half-tone mask capable of achieving both miniaturization of a pattern and multiple gradations is provided.A second semitransparent region formed of a lamination of the first semi-transmissive film and the second semi-transmissive film, and a second semi-transmissive region made of...
本发明涉及一种半色调掩模及其制造方法,用来减少形成多个半透过部的半透过材料的数目以及过程的数目,从而减少制造成本,其中,所述半色调掩模包括:基底;透射区,形成在所述基底上以透射预定波长的辐射光;以及半透过区,形成在所述基底上,具有由两种或多种半透过材料交替层叠的多个层,并且半透过区形成有根据层叠的半透过...
The halftone mask, also called the attenuated phase shifting mask, is assumed to be a preferred candidate among many types of masks since it can be applied to all feature types and it is relatively easy to fabricate. We studied the process latitude of the halftone mask with normal illuminati...
A method of fabricating a halftone mask, which includes the steps of: forming shielding patterns on a transparent substrate; forming a first halftone transmission pattern on the transparent substrate between the shielding patterns; and forming a second halftone transmission pattern on the first half...
科研柔性薄膜电极金属光罩异形MASK阵列孔掩模微结构精加工小批量 华诺激光品牌 北京华诺恒宇光能科技有限公司 4年 查看详情 ￥29.00/台 山东潍坊 加长加大型号遮光罩 小窗遮雨罩 通风窗挡雨挡光罩 挡风框 永盛品牌 诸城市永盛农牧科技有限公司 4年 查看详情 ￥30.00/台 山东潍坊 鸡场用通风窗挡风罩 鸡舍侧风小...
Control the print angle of all three channels together or each color channel independently like real halftone prints. Halftone also now provides a feature where it can output a halftone pattern using a custom color for masks. The user can then use the mask for any number of applications as...
Focused ion-beam imaging of defects on deep-UV single-layer halftone masks not available.Photomask and X-Ray Mask Technology IIIHiroko NakamuraHaruki KomanoK.SugiharaT.KoikeIwao Higashikawa