CVD Silicon Carbide Coating Product Technical Requirements. 1. Coating material: (1) Material: Silicon Carbide (SiC)。 (2) Purity: ≥99.9%。 (3) Particle size: 0.1-1μm. (4) Crystal structure: β-SiC. 2. Coating process: (1) Method: Chemical Vapor Deposition (CVD)。 (2) Substrate ...
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CVD SiC coated components are chemically inert and thermally stable A uniform high quality CVD SiC coating helps consumable parts last longer in production; which ultimately lowers manufacturing costs. Silicon Carbide deposit thickness ranges from a coating of 20-40μm ...
CV D SiC涂层的沉积速率相应增大;1000~1200e沉积过程为化学动力学控制过程,1200~1300e沉积过程为质量转移控制,1000e和1100e沉积的SiC涂层表面光滑、致密;1200e和1300e沉积的SiC涂层表面粗糙、多孔;随着沉积温度的提高, CV D SiC涂层的晶体结构趋于完整,当温度超过1150e时,涂层中除B-SiC外还出现了少量A-SiC。
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石墨表面CVD SiC 涂层微观结构研究 黄 浩, 陈大明, 仝建峰, 李宝伟 (北京航空材料研究院先进复合材料国防科技重点实验室,北京100095)摘要:研究CH 3S i C l 3-H 2-A r 体系中在石墨表面化学气相沉积S i C 涂层工艺,并对涂层形貌进行SE M 分析。考察沉积温度、气体比例、气体流量以及稀释气体含量对化学气相...
thedirectionoffurtherresearchisalsopredicted.Keywords:coating;SiCfiber;composites;interfacereaction;interfacebondstrength1前言采用化学气相沉积法(ChemicalVaporDeposition,CVD)制备得到的连续SiC纤维具有很高的室温拉伸强度和拉伸模量,较低的密度,良好的高温性能以及抗腐蚀、抗蠕变、抗辐射等一系列优点,适用于增强聚合物基、...
SiC composites.The results show that the deposited coatings mainly consist of β-SiC.The surface of coating prepared with reducing the flow of diluting gas is smooth and dense,and also strongly bonded with the substrate.As to the coated C/C-SiC composites,the linear ablation rate is reduced ...
Silicon Carbide Coating (SiC) This coating can be deposited through numerous methods: RPI utilizes the DCD process. The high micro-hardness of silicon carbide (SiC) coating provides a wear-resistant layer to tooling. In our process, silicon carbide is generally used in conjunction with a dry-fi...
关键词：低压C V D; SiC涂层；致密；沉积速率 中图分类号:TQ174.75+8.16 文献标识码:A 文章编号：1001-9642(2021)12-0045-08 Low Pressure CVD Formation Technology of Dense SiC Coating MAO Bangxiao1, XIA Xisheng12, QIN Rongrong1, YANG Guangren1,LI Binbin3, LYU Haihua1 (1.Beijing Xinfeng ...