A nozzle is formed at an end of a slurry supply tube that is inserted into the tube receiving hole to supply slurry. Upper and lower shaft coupling parts are recessed by a predetermined depth in the upper and lower parts of one side of an arm body(110). The arm body has a DIW ...
Self-cleaning slurry arm on a CMP tool 专利名称：Self-cleaning slurry arm on a CMP tool 发明人：Hu Fu Dao Ho,Ying Chih Liu,Yeong Shiang Hu,Simon Shu,Ben Liu,Jing Long Lin 申请号：US10151134 申请日：20020520 公开号：US06506098B1 公开日：20030114 专利内容由知识产权出版社提供 专利附图：摘...
A problem with prior CMP systems is that splattering of slurry on the upper and side surfaces of the splash-board 18, of the slurry arm assembly 19, occurs because of the rotational interaction between the substrate and polishing pad during the polishing operation. The spatter lands on the ...
Conditioning3-3、Spindlecarrier(1)Carrier(2)Processingmethod(3)Drive(4)Revolutionspeedrange(5)Spindleforce(6)Forcecontro1(7)Waferhold(8)Uniformitycontrol(9)Vacuumchuck3-4、Slurryline(1)Feedmethod(2)Rinsemethod(3)Monitor3-5、Cleaningsection(1)Carriercleaning(2)Wafercleaning3-6、Parametersnewarm04...
Administrative/SchedulingWhatisCMP?WhyuseCMP?OtherPlanarizationTechniquesCMPVariablesCMPConsumables PadSlurryConditionerRetainingRing Howdoesitwork?IssueswithCMPTheoreticalCMP Preston’sEquation Nextweek’slab SafetyFirst WewillbeworkingwithKOHKOH,likemostbases,is...
应用材料 Mirra 3400和 Mesa CMP POST 清洗器的工艺说明书
(slurry conc) Loader drain :1~1 /2”FNPT(slurry rinse) D1 water return :3 /8”FNPT(slurry rinse) *Drain pan :Outlet should be provided at the drain hole . (6) Slurry Bulk slurry option Slurry IN PFA 1 /4”tube Slurry out PFA 1 /4”tube *Double tubing shall be inside between ...
Method for improved CMP pad conditioning performance A new pad conditioning arm design enables the use of closed-loop control (CLC) to improve conditioning performance throughout the life of a pad and disk pa... GE Menk,S Dhandapani,CC Garretson,... - IEEE 被引量: 2发表: 2010年 ...
Mapping data transfer mechanism (2) Cassette elevator Loader elevator two cassettes (cassettes are put normally)Unloader elevator on cassette (used as a buffer cassette to be put reverse)(3) Wafer transfer method Vacuum adsorption by the wafer transfer robot (with the stainless steel transfer arm ...
Mapping data transfer mechanism (2) Cassette elevator Loader elevator two cassettes (cassettes are put normally)Unloader elevator on cassette (used as a buffer cassette to be put reverse)(3) Wafer transfer method Vacuum adsorption by the wafer transfer robot (with the stainless steel transfer arm ...