化学干法刻蚀：Chemicaldryetching(alsocalledvaporphaseetching)doesnotuseliquidchemicalsoretchants.Thisprocessinvolvesachemicalreactionbetweenetchantgasestoattackthesiliconsurface.Thechemicaldryetchingprocessisusuallyisotropicandexhibitshighselectively.Anisotropicdryetchinghastheabilitytoetchwithfinerresolutionandhigheraspectratio...
Plasma Etching is a dry etching method which is the best way to clean a surface before modification. It removes any unwanted organic residues.
给出Wet Etching湿法刻蚀的定义,并从各向同性和各向异性角度对Wet Etching湿法刻蚀进行分类。给出Dry Etching干法刻蚀的定义,并从物理和化学角度对Dry Etching干法刻蚀进行分类,并说明了反应离子刻蚀在Dry Etching干法刻蚀中的地位。 文档格式: .ppt 文档大小: ...
百度试题 题目中国大学MOOC: 英翻中dry etching wet etching 相关知识点: 试题来源: 解析 干法刻蚀 湿法刻蚀 反馈 收藏
Wet / Dry Etching , Replication Techniques and other Nanofabrication Methods Wet Etching
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WetandDryEtching湿法和干法刻蚀.ppt,NANO-MASTER, INC. Wet and Dry Etching 湿法和干法刻蚀 NANO-MASTER 那诺-马斯特中国有限公司 吴运祥 2017年8月16日 NANO-MASTER, INC. 各向同性和各向异性 When a material is attacked by a liquid or vapor etchant, it is removed
A comparison of excimer laser etching and dry etching process for surface fabrication of biomaterials One of the great possibilities for the future of bioengineering is the capability to control the movement and differentiation of individual cells. In this ... AP Mello,MA Bari,PJ Prendergast - 《...
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