PROBLEM TO BE SOLVED: To provide a method for forming an air gap under the end of a gate electrode to reduce the parasitic overlap capacitance of a gate end.PRADEEP YELEHANKA RAMACHANDRAMURTHYエレハンカラマチャンドラマーシープラディープZHENG JIA ZHEN...
Fabrication of Nano-Gap Electrode Pairs Using Atomic-Layer-Deposited Sacrificial Layer and Shadow Deposition We propose a new fabrication process of nano-gap electrode pairs using an atomic-layer-deposited (ALD) sacrificial layer and the shadow deposition techniqu... Chan,Woo,Park,... - 《Japanese...
The “G”, “D”, “S” and “B” stand for the gate, drain, source and bulk electrode respectively as usual, “SP” terminal stands for the source poly electrode. The source and bulk electrode are connected by metal. M1, M2 and M3 indicate three different parts of the chip shown ...
structure provide an undercut beneath a spacer that is adjacent a gate electrode within a field effect structure such as a field effect transistor ... BB Doris 被引量: 0发表: 0年 Recessed channel insulated-gate field effect transistor with self-aligned gate and increased channel length A metal...
In this work, the influence of random vibration on the functioning of a 2-electrode sensi-tive element of an MMA with a sandwich construction using the principle of operation based on a change in the relative dielectric constant of a capacitor dielectric under acceleration was inves-tigated. In...
PROBLEM TO BE SOLVED: To provide a method for forming an air gap under the end of a gate electrode to reduce the parasitic overlap capacitance of a gate end.;SOLUTION: A gate spacer oxide layer (40) is formed on a semiconductor substrate (10) at least at the same thickness as a gate...
at each electrode for gases production (operando electrochemical mass spectrometry (EMS) analysis and pressure records), 3)utilized to oxidize the electrodes surface (from post‐mortem surface functionality determination by temperature programmed desorption (TPD)), and 4)used for other parasitic reactions...
Diagnostic criteria were gathered during a decade of lifetime testing concerning the destruction of the electrode materials and the evaporation of electrolyte. The aging behavior of supercapacitors is quantified on the basis of capacitance loss, parasitic side reactions, and the chemical analysis of ...
Conductive epoxies were used in between the PZT/stainless-steel and PZT/shell to use the stainless-steel and the shells as bottom and top electrode, respectively, since the Si-SiC hemispherical shells are conductive. Epotek 353ND was always used in the combination with conductive epoxies to ...