02. Optics The TWINSCAN NXT:1980Di includes a 1.35 NA 193 nm catadioptric projection lens that can achieve production resolutions down to 40 nm (C-quad) and 38 nm (dipole) and an in-line design supporting full 26 x 33 mm field size, 4X reduction and reticle compatibility with existing de...
消息称该特别版 DUV 光刻机基于TwinscanNXT: 1980Di 光刻系统改造,而 1980Di 是 10 年前推出的旧型号,不在本次官方禁令范围内。1980Di 是 ASML 现有 2023-07-07 15:46:39 ASML:已获许可,年底前持续出货给中企 将不会影响已有的订单发货。 依据中国日报和路透社的报道,ASML表示,荷兰政府已经颁发了截至9月...
ASML表示,出口管制条例只涉及部分最新DUV型号, 包括TWINSCAN NXT:2000i及后续推出的浸润式光刻系统。 ASML还表示,上述规定是在9月1日生效。 ● TWINSCAN NXT:1980Di不受影响。 TWINSCAN NXT:1980Di的分辨率可以达到≤38nm。 14nm芯片是经过“多重曝光”完成。更先进的7nm芯片如果通过1980Di曝光的话,会导致良率陡然...
ASML TWINSCAN NXT:1980Di Immersion Scanner used Manufacturer:ASML - ID: 29724457 - EQUIPMENT: Immersion Scanner - Maker: ASML - Model: TWINSCAN NXT:1980Di - Condition: AS-IS - Wafer size: 300mm Hwaseong-si, South Korea Click to Request Price ...
ASML TWINSCAN NXT:1980Di Immersion Scanner used Manufacturer:ASML - ID: 29724457 - EQUIPMENT: Immersion Scanner - Maker: ASML - Model: TWINSCAN NXT:1980Di - Condition: AS-IS - Wafer size: 300mm Hwaseong-si, South Korea Click to Request Price ...
Id: 29724456, Equipment: i-Line Scanner, Maker: ASML, Model: TWINSCAN AT, Condition: AS-IS, - ID: 29724456 - EQUIPMENT: i-Line Scanner -...