The thin films that are used to fabricate microelectronic devices are all formed using some kind of deposition technology where the term refers to the formation of a deposit on a substrate.
Thin Film Deposition薄膜沉积技术
THINFILMDEPOSITION–Chapter9 Introduction •Manyfilms,madeofmanydifferentmaterials aredepositedduringastandardCMOSprocess. •Requirementsordesirabletraitsfordeposition: 1.Desiredcomposition,lowcontaminates,good electricalandmechanicalproperties. 2.Uniformthicknessacrosswafer,and wafer-to-wafer. 3.Goodstepcoverage(...
Handbook of Thin film Deposition. Oxford: Elsevier.SESHAN K. Handbook of Thin Film Deposition [ M ]. New York :William Andrew Publishing,2012.Krishna Seshan, Handbook of Thin Film Deposition, third ed., Waltham, 2012.Seshan, K., 2012. Handbook of Thin Film Deposition. William Andrew....
thin film memory 【计】 磁薄膜存储器; 薄膜存储器 thin film formation 【电】 薄膜形成 相似单词 thin film 【计】 薄膜 deposition n. 1.[U]沉积 2.[C]沉积物 3.[U]罢免 4.[C]证词 thin a. 1.薄的;细的;瘦的,瘦削的 2.稀薄的;淡薄的,淡的;微弱的,弱的 3.稀少的,稀疏的;缺乏的 ...
Film Substrate 蒸发 MassDepositionRateperunitareaofsourcesurface: ()PTP rT M CR emm −=)( 1 coscos 2 2 1 ϕθ θ ϕ r e P P Substrate C m =1.85x10 -2 r:source-substratedistance(cm) T:sourcetemperature(K) P e :evaporantvaporpressure(torr),functionofT ...
Shape Deposition Manufacturing 形状沉积制造 Thin-Film Deposition 薄膜淀积 Mechanical Engineering 机械工 …blog.sina.com.cn|基于1 个网页 例句 释义: 全部,薄膜沉积,薄膜沈积,薄膜淀积 更多例句筛选 1. Some of the designs are highly sensitive to manufacturing errors and require accurate monitoring and ...
Thin-film deposition
Depending on whether transfer occurs during both the down- and the upstroke, or only during immersion or emersion of the substrate, three different deposition types are possible, designated X, Y, and Z, respectively, which differ with respect to molecular orientation (Fig. 3). Sign in to dow...
TheHandbook of Thin Film Depositionis a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applicati...