The thin films that are used to fabricate microelectronic devices are all formed using some kind of deposition technology where the term refers to the formation of a deposit on a substrate.
If the film is too thin, surface processes will have a dominant effect on the results, while films that are too thick do not have the same opto-electronic responses. Furthermore, plenty of techniques can be used to obtain the overall picture of the material properties. Some of these ...
Deposition Technologies and Applications: Introduction and Overview. In Handbook of Thin Film Deposition Processes and Techniques; Seshan, K., Ed.; William Andrew: Norwich, NY, USA, 2001; pp. 11-43.Kern et al. (1988) " Deposition Technologies and Applications: Introduction and Overview, " In...
Tripathi, S., Kumar, B., & Dwivedi, D. K. (2018, November). Chalcogenide glasses: thin film deposition techniques and applications in the field of electronics. In 2018 5th IEEE Uttar Pradesh Section International Conference on Electrical, Electronics and Computer Engineering (UPCON) (pp. 1-4...
In the second section, we briefly remind deposition/growing techniques and methods for characterization film properties. The overview of advances in depositing thin metal films on various surfaces follows. Techniques for depositing gold and silver come first. Then, we describe the deposition of Al,...
Amongst all the EOR techniques, chemical EOR method, a non-thermal EOR method, has been adjudged as the most promising because of its higher efficiency, technical and economic feasibilities and reasonable capital cost [13]. The application of this EOR method became popular in the 1980s due ...
Thin films of the BFO material are the most widespread and popular form of the material. Morphology, properties, variety of thicknesses and their effect on leakage current have been described in detail. The deposition methods of thin films include: the sol gel method, Pulsed Lased Deposition (...
The current understanding of the electronic structures of TiO2 is mainly based on the results of independent and combined theoretical calculations, usually in the framework of the density functional theory (DFT) [26] and experimental techniques (e.g., synchrotron radiation photoelectron spectroscopy, ...
Deposition(general) Uniformstepcoverage,control AdhesionandStepCoverage Conformaldeposition(maynotbewhatyouwant!) Voidfreefill narrowspacevswidespace GrainStructure,thinfilmproperties Stickingco-efficient Contaminationfree;Foralloys,composition Extra:Selfplanarizing ...
The first chapter is an overview of topics that are relevant to the work carried out in this thesis. The chapter focuses on the description of techniques used for thin film deposition. A detailed review of CVD-type techniques (ALD/... A Gairola 被引量: 0发表: 2011年 Metal CVD for micro...