Thin film deposition methodsPROBLEM TO BE SOLVED: To deposit a thin film under an environment with extremely little water and oxygen, to form a high-dielectric insulating thin film and a silicon epitaxial film and to maximally reduce water that remains as impurities in the film.遠藤 和彦...
Thin-film deposition method assisted by mid-infrared-FEL We propose the novel application of the mid-infrared (MIR) FEL to the thin-film fabrication process. During the application, a substrate on which a thin fi... M Yasumoto,T Tomimasu,A Ishizu,... - 《Nuclear Instruments & Methods in...
Thin-film deposition methodIn a thin-film deposition method, a substrate is placed in a heat chamber having a pressure equal to or higher than an atmospheric pressure, and the substrate is heated in the heat chamber by supplying gas having a temperature higher than a room temperature by ...
Thin layer deposition methods, and the resulting product As for this invention, at least 1 where the oxide of 1 kinds is designated as the base layer being transparent at least, and being the method of obtaining the backing material where phase was covered by the thin film layer of conduct...
Thin film deposition method, capacitor device and method for fabricating the same, and semiconductor device and method for fabricating the same The present invention relates to semiconductor techniques using high dielectric oxides, more specifically to a thin film forming method for forming a thin film...
Thin film carbon material and method of depositing the same ofWhile CVD (chemical vapor deposition) methods and enhanced CVD methods for the production of thin films have recently been attracting considerable intere... S Yamazaki,S Hayashi - EP 被引量: 12发表: 1994年 'Deposition Method And De...
thin-film deposition 英 [θɪn fɪlm ˌdepəˈzɪʃn] 美 [θɪn fɪlm ˌdepəˈzɪʃn]网络 薄膜沉积; 薄膜沈积
A method, experimental arrangement, and some particular details of the process for Al thin film deposition from r.f. metal plasma are described in this pap... AA Mohnjuk,IV Gusev,VP Belevsky - 《Nuclear Instruments & Methods in Physics Research》 被引量: 1发表: 2000年 Continuous Deposition...
薄膜沉积(ThinFilmDeposition)网络收集薄膜沉积(ThinFilmDeposition)1何谓薄膜沉积在机械工业、电子工业或半导体工业领域,为了对所使用的材料赋与某种特性在材料表面上以各种方法形成被膜(一层薄膜),而加以使用,假如此被膜经由原子层的过程所形成时,一凳时藻喂处窝掘砰窜鸽纽友造掂齿楔仗瞅瓤船稽逞豁门烽调始莽漂...
专利名称:THIN FILM DEPOSITION METHOD AND SUBSTRATE PROVIDED WITH THIN FILM DEPOSITED BY THE METHOD 发明人:FUJISAWA AKIRA,藤沢 章,SUEYOSHI YUKIO,末吉 幸雄,HIRATA MASAHIRO,平田 昌宏,YAMAMOTO TORU,山本 透,KIYOHARA KOICHIRO,清原 康一郎,ICHIKI KIYOTAKA,市來 聖敬 申请号:JP特願2002-293095(P2002-...