TEM Sample Preparation and FIB- Induced Damage. MRS Bull. 32, 400-407 (2007).Mayer J, Giannuzzi LA, Kamino T, Michael J (2007) TEM sample preparation and FIB-induced damage. MRS bull 32(05): 400-407.J. Mayer, L.
Finally a 5 keV gallium beam energy at a beam current of 20 pA was used to reduce FIB induced damage by scanning the beam at 2° to the face of the sample on either side for one minute each. The final lamella is shown in Fig. 2(d). The sample was plasma cleaned for 3 min in...
Before in-situ TEM compression the samples were annealed in-situ in the high vacuum (∼10−5 Pa) of the TEM column (JEOL 2100 F, JEOL, Tokyo, Japan) operated at 200 kV to remove FIB-induced defects [42]. The pillars were first heated from 298 K to 353 K in 10 ...
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内容提示: Philips Semiconductors Nijmegen PMOFIB-TEM sample preparationby in-situ lift-out techniqueHarry Roberts and Bert OtterlooPhilips Semiconductors, PMO department 文档格式:PDF | 页数:24 | 浏览次数:60 | 上传日期:2012-09-03 21:28:18 | 文档星级: ...
The sample preparation techniques used for preparing traditional TEM samples including lamellas, nanowires and particles are suitable for the Nano-Chip. FIB lamellas are the most commonly used sample for biasing experiments and DENSsolutions in conjunction with some close academic partners have developed...
The laser adds extra features to the FIB-SEM, extending its already wide application space.1 By means of fs laser ablation, significant volumes of material can be rapidly eliminated from a sample and, in most cases, with insignificant damage to the sample. Thus, accessing regions of interest ...
iST FIB-TEM MA Techniques Typical FIB/TEM Techniques/Applications 鮑忠興 Jong-Shing Bow
and planar FeRh samples have been prepared from bulk substrates by focused ion beam (FIB) methods or HF-etching of the substrates. Comparison is made between the integrity of the planar FeRh TEM samples prepared via different methods and the ability to perform quantitative measurements of ...
surface/subsurface mechanical damage introduced during sample polishing, any surface oxidation or contamination will also have a significant effect on FIB imaging. Some FIB systems are equipped with plasma cleaners to remove surface contaminants and thin oxide films in-situ. In addition, the galliu...