LPCVD Processes Silicon nitride Low temperature oxide (LTO) High temperature oxide (HTO) TEOS oxide Polysilicon, with tilt/flat temperature profile Doped polysilicon Oxynitride PECVD Processes Silicon nitride (incl. anti-reflective SiN solar cell coating) Silicon oxide Oxinitride DCE or HCl option...
Pyrogenic Wet Oxide with External Burning System Dry Oxide LPCVD Processes Silicon nitride / low stress nitride Low temperature oxide (LTO) High temperature oxide (HTO) TEOS oxide Polysilicon, with tilt/flat temperature profile Doped polysilicon Oxynitride DCE or HCl optional for all processesTechnical...
SVCS将多年半导体行业的经验与质量带入太阳能电池片生产中。SVSOL设备家族 包括应用于磷扩散,硼扩散工艺的卧式扩散炉,应用于抗反射涂层和钝化处理工艺 PECVD以及LPCVD设备,超高纯气体和液体传输系统。所有设备同时可以应用于大 批量生产和研发用途。 简介 •磷,硼掺杂/扩散工艺的常压扩散炉(三氯氧磷,三溴化硼等) ...