L. Biance et al., "Sub-5 nm FIB direct patterning of nanodevices," Microelectronic Engineering, vol. 84, no. 5-8, pp. 779-783, 2007.Gierak, J.; Madouri, A.; Biance, A.L.; Bourhis, E.; Patriarche, G.; Ulysse, C.; Lucot, D.; Lafosse, X.; Auvray, L.; Bruchhaus, L.;...
Nanoengraving of membranes as a template for nanopores fabrication is an application field of growing interest. Similarly to the formation of ion tracks in membranes created when high-energetic ions pass trough thin foils, it is possible with a FIB system to fabricate, design and organise ...