L. Biance et al., "Sub-5 nm FIB direct patterning of nanodevices," Microelectronic Engineering, vol. 84, no. 5-8, pp. 779-783, 2007.Gierak, J.; Madouri, A.; Biance, A.L.; Bourhis, E.; Patriarche, G.; Ulysse, C.; Lucot, D.; Lafosse, X.; Auvray, L.; Bruchhaus, L.;...
In addition to the above-mentioned functional devices which have already been commercialized, the materials and structures at the sub-10 nm scale also bring many novel and interesting properties to emerging nanodevices. Generally, the novel properties at the sub-10 nm scale can either be enabled ...
Glassy carbon nanofibers (GCNFs) are considered promising candidates for the fabrication of nanosensors for biosensing applications. Importantly, in part due to their great stability, carbon electrodes with sub-10 nm nanogaps represent an attractive platform for probing the electrical characteristics of...
In this work, we detail the advanced methodology we have carefully optimised for such deep sub-10 nm nanodevices fabrication using our high-performance FIB instrument.EBSCO_AspMicroelectronic Engineering