We present a fully integrated, single-crystal silicon (SCS), micromachined tunable resonator with a natural resonant frequency of nominally 1 MHz and a room temperature quality factor approaching 10,000 in vacuum. The microelectromechanical systems (MEMS) process used to create the SCS tunable ...
A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of125pg∕cm2is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of2.182MHz, with a quality factor exceeding106...
Resonant devices are now being produced in single‐crystal silicon with released features as small as 30 nm. Besides novel device applications these structures may be used to explore fundamental properties and mechanisms that include internal friction as a function of scale. Measurements and analysis ...
Seppa, "Long-term stability of single-crystal silicon microresonators," Sensors and Actuators, A: Physical, vol. 115, pp. 23-27, 2004.M. Koskenvuori, T. Mattila, A. Haara, et al., "Long Term Stability of Single-Crystal Silicon Microresonators," Sensor. Actuator., A-Phys. 115 (1), ...
300-nm-thick silica-coated silicon substrate. Secondly, to avoid the use of metallic adhesion layers (such as Cr, Ti) that can affect the electrical property of the gold films, the exposed region of the masks was functionalized with a monolayer of (3-aminopropyl)trimethoxysilane instead before...
A microwave magnetic field crossed with a static field was found to exert a resonance effect on the dislocation mobility in single crystals of p -type silicon. The frequency of alternating field and the magnitude of static magnetic field corresponding to the maximal crystal hardening satisfy ...
Solid state sensor with dual resonant vibratable members A solid state sensor, micromachined in silicon, comprised first and second beams which can be optically excited into resonant vibration. The first beam is arranged to be acted upon by a diaphragm, so that the tension in it, and therefore...
We use\([100]\)-cut, electronic grade single-crystal diamond samples synthesized by chemical vapor deposition (CVD) from Element Six Corporation. Silicon ions (\(^{28}{\rm{Si}}^{+}\)) are implanted on the top surface of the diamond at an energy of\(150\; {\rm{keV}}\)and a den...
Micro-spectrometer based on photonic-crystal (PC) slabs.aSchematic of the spectrometer, which consists of an array of PC slabs with different parameters. These slabs are integrated on top of a CMOS sensor array.bOptical image of the fabricated 6 × 6 PC structures. Three scanning electron...
Given that crystal strain can be treated effectively as a local static electric field σ (ref. 27), it combines with the applied electric field E to give the total effective electric field = E + σ at the NV centre. In the regime where Dgs µBgeB and Dgs dgs , second-order ...