Book2014,Sensor Technologies for Civil Infrastructures D.Ozevin Explore book aSilicon Single crystalsiliconis the most widely used semiconductor material as asubstrate materialdue to its excellentmachinability,mechanical stability, and the potential to combine sensing elements and electronics on the same su...
Silicon carbideSingle crystallineSensorMass detectionResonant frequencyThe mass detection capability of a microresonator sensor on a wide bandgap semiconductor – single crystal 4H-SiC was investigated.The sensor is capable of sensing picogram and femtogram mass with a sensitivity of 799.3 Hz/pg (1.25fg...
A microwave magnetic field crossed with a static field was found to exert a resonance effect on the dislocation mobility in single crystals of p -type silicon. The frequency of alternating field and the magnitude of static magnetic field corresponding to the maximal crystal hardening satisfy ...
Figure 2a illustrates the framework of spectral imaging with a liquid crystal spectral lens (LC-SLENS). By applying a voltage sequence on the LC-SLENS, different intensity image frames of the detected object can be captured with a complementary metal-oxide-semiconductor (CMOS) sensor. The simult...
The antenna is designed to have a resonance wavelength of 1500 nm and be off-resonant with the exciting field centered at 2.7 μm for two main reasons; the first is to transfer the full bandwidth of the optical pulse to the antenna tip, as a sharp resonance would increase the local...
1. A method for constructing an integrated circuit resonator device of single crystal silicon formed on a silicon-on-insulator (SOI) substrate comprising the steps of: a) forming a surface silicon layer, and an intermediate layer of SiO2on said substrate; b) opening a first mask area at said...
Integrated semiconductor-on-insulator (SOI) sensors and circuits which are electrostatically bonded to a support substrate, such as glass or an oxidized silicon wafer, are disclosed. The SOI sensors a
The invention discloses a single anchor point support type silicon micro-machined resonant accelerometer which comprises a lower layer glass substrate, a lead wire layer is formed by sputtering metal on an upper surface of the lower layer glass substrate, a bonding layer is arranged on the glass...
material on top of a sacrificial material. The material is then patterned and the device is released using an etch which is selective to only the sacrificial material. The material used for this is not single-crystal, resulting in poorer behaviors including lower Q when used for a resonant ...
1) resonantor of single crystal silicon micromechanical gyro 微机械硅陀螺仪谐振器2) silicon micromachined vibratory gyroscopes 硅微型机械振动陀螺仪3) silicon micromechanical vibratory gyroscope 硅微机械振动陀螺仪 1. Study on viscous damping is critical for the design of silicon micromechanical ...