Silicon resonant type pressure sensorYuji AraiTadashi Nishikawa
A silicon resonant type pressure sensor has a sensing diaphragm to which a measuring pressure is to be applied; and a vibrating beam which is embedded on the sensing diaphragm, and which is made of a semiconductor, wherein the vibrating beam further has a vibrating beam body having first and...
This paper describes the design, fabrication and test of a silicon micromachined resonant pressure sensor. A square membrane and a doubly clamped resonant beam constitute a compound structure. The former senses the pressure directly, while the latter changes its resonant frequency according to deformatio...
A resonant pressure sensor has been fabricated which consists of a single-crystal silicon beam located in the center of a single-crystal silicon diaphragm. The beam is excited electrostatically and its motion are detected by piezoresistors. The structure is fabricated with silicon fusion bonding. Ove...
The frequency characteristics of the beam resonator of a thermal excited silicon resonant pressure sensor are investigated in this paper. The sensing compo... S Fan,HL Man - IEEE 被引量: 23发表: 2003年 Improved Aging Characteristics of NTC Thermistor Thin Films Fabricated by a Hybrid Sol–Gel...
The devices are a capacitive vacuum sensor, a surface-micromachine microdiaphragm pressure sensor, and a resonant pressure sensor. Vacuum sealing for these devices is accomplished using anodic bonding, films deposited using low-pressure chemical vapor deposition, and thermal out-diffusion of hydrogen, ...
This work is focused on the design, fabrication, and characterization of silicon laterally resonant microcantilevers for measuring absolute pressure. The authors have demonstrated the integration of resonance electrostatic actuation and capacitive readout with a microstructure based on a couple of electrodes...
A new technique for the actuation and detection of resonant sensor oscillations is presented. Time multiplexing is used to actuate and detect vibrations using a single fibre. The scheme could be extended to permit multiplexing of several sensors onto a single fibre. The pressure and temperature char...
A resonant micro-pressure sensor based on a double-ended quartz tuning fork (DEQTF) and bossed silicon diaphragm in atmospheric packaging is presented. To achieve vacuum-free packaging with a high quality factor, the DEQTF is designed to resonate in an anti-phase vibration mode in a plane tha...
A quasi-digital pressure sensor based on polysilicon resonant microbeams has been demonstrate... DW Burns,JD Zook,RD Horning,... - 《Sensors & Actuators A Physical》 被引量: 134发表: 1995年 Optimum design considerations for silicon piezoresistive pressure sensors Optimum design considerations for ...