A temperature-insensitive silicon resonant pressure sensor is developed with an extremely low temperature coefficient of frequency (TCF). A novel self-compensation method is proposed to counteract the effect of the elastic modulus temperature coefficient (TCE) of silicon on the TCF by the thermal ...
A silicon resonant type pressure sensor has a sensing diaphragm to which a measuring pressure is to be applied; and a vibrating beam which is embedded on the sensing diaphragm, and which is made of a semiconductor, wherein the vibrating beam further has a vibrating beam body having first and...
A noncontact wireless passive radio frequency (RF) resonant pressure sensor with optimized design for applications in high-temperature environments 2014, Measurement Science and Technology A solution to reduce the time dependence of the output resistance of a viscoelastic and piezoresistive element 2013, ...
This paper describes the design, fabrication and test of a silicon micromachined resonant pressure sensor. A square membrane and a doubly clamped resonant beam constitute a compound structure. The former senses the pressure directly, while the latter changes its resonant frequency according to deformatio...
Turning OFF the filter (27 V) maintains an ER > 20 dB for resonant wavelengths Full size image Characterization results for the device in the ON and OFF states are provided in Fig. 5c, which depicts the optical power transmission to the through and drop ports in a narrow ...
S. et al. Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever. Sens. Actuators B Chem. 180, 77–89 (2013). 45. Wasisto, H. S., Merzsch, S., Uhde, E., Waag, A. & Peiner, E. Handheld personal airborne nanoparticle detector based on micro- ...
Precision gaps are etched into the caps to provide air damping to suppress the resonant peak of the structure. Because the part is critically damped, the frequency response is flat up to several kilohertz with little dependence on temperature. Small elevated stops on the top and bottom caps ...
The selection of these structural parameters is dependent on many considerations, such as the size of the biomolecules to be detected, and the working mechanism of biosensors (such as amperometric, conductometric, and resonant frequency biosensors). For example, an optical biosensor using ...
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silicon resonant pressure sensor is described. 详细介绍了Druck RPT 200型硅谐振压力传感器的工作原理,阐述了大气数据系统的结构、建模及硬件实现等研制过程;该系统采用Druck RPT 200型硅谐振压力传感器替代原振动筒式压力传感器测量压力,并采用小型单板计算机作为大气数据系统的嵌入式计算机,实现高度、空速和马赫数等参数...