The velocity dependence is weaker for the other two less reactive chemicals, and is the same as that predicted by Preston equation for DI water. Our earlier empirical model. R= KPV+BV + Rc, where K, B, and R_c are constants, describes all the polish rate data satisfactorily.S.Ramarajan...
This model is based on Preston''s equation, but is explained in terms that account for the reduction in material removal rate that occurs as the time since plate charging increases. Data are presented that compare experiments for one material, NI-Zn ferrite, with predictions obtained using the...
S theory,the correction coefficient was given for Preston equation with the introduction of hardness proportion coefficient,surface hardness coefficient and particle size.Com bined with the theory of elasticity.stress coefficient was modified under the situation of soft—consolidation.Quantitative model of ...
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Modified Preston Equation- Revisited The effect of pressure and velocity on the polish rates of copper was determined in DI water and in the presence of ferric nitrate, H202/glycine, and NH4OH with alumina particles as the abrasives. The polish rate shows a stronger depende... S Ramarajan,SV...
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matter representing a total mass of only one grain, and possessing the normal velocity of the ether particles (that of a wave of light), encloses a store of energy represented by upwards of one thousand millions of foot-tons.” Does this statement correspond precisely to the equation E=mc2...
Preston equationTeflon toolFor the polishing process, Preston (1927) [1] proposed wear, h, is proportional to the work given by a frictional force, ffr, on the glass. He assumed ffr does not depend on relative velocity, v, between the glass and the tool. Téllez et al. (2007) [2] ...
S.V. BabuELSEVIERThin Solid FilmsQ Luo,S Ramarajan,S V Babu.Modification of the Preston equation for the chemical mechanical polishing of copper. Thin Solid films . 1998Q Luo,S Ramarajan,S V Babu.Modification of the preston equation for the chemical-mechanical polishing of copper. Thin Solid...
In this research, the relationship between Preston's coefficient and friction coefficient in chemical mechanical polishing(CMP) is investigated and a basic mathematical model of the polishing process, Preston's wear equation, is modified.Yongsik Moon...