Edge effects with Preston equation. In: Procedings of SPIE, Astronomical Telescopes and Instrumentation. 2003, 4840: 598–603E. Luna-Aguilar, A. Cordero-Davila, J. Gonzalez Garcia, M. Nunez-Alfonso, V. H. Cabrer
There are published theoretical reports on modelling edge-effects in polishing, one studying the parametric tool influence functions [5]. Other reports [6, 7] considered a "skin model" related to the Preston equation. Further reports [8, 9] have presented experimental data showing vari- ation ...
Based on the edge effects in the ultra precision polishing process, a revised skin model is used to predict material removal rate (MRR) of circular wafer. With force equation and torque equation, in order to calculate the skin width and the pressure distribution, a revised formula is given. ...
Compared with the reference case, the middle-damage case at the suction side exhibited a higher temperature—by approximately 5 (average) and 2 K (maximum). Considering the effects of the HS, the maximum temperature in the middle-damage cases was higher than that in the other cases. Figure ...