rangeoffilmthicknesses.Thefilmthicknessvs.spin-speedcurves displayedinFig.1through8providetheinformationrequiredto selecttheappropriatePMMAdilutionandspinspeedneededto achievethedesiredfilmthickness. Therecommendedcoatingconditionsare: (1)Dispense:STATIC5-8mlfora150mmwafer ...
A4 A2 495PMMA A Resists Solids: 2% - 6% in Anisole Figure 3 5000 10000 15000 20000 25000 0 500 1000 1500 2000 2500 3000 3500 4000 4500 F i l m T h i c k n e s s ( Å ) Spin Speed (rpm) A11 A8 495PMMA A Resists Solids: 8% - 11% in Anisole Figure 4 0 2000 ...
A4 C2 0 A2 500 1000 1500 2000 2500 3000 3500 4000 4500 0 500 1000 1500 2000 2500 3000 3500 4000 4500 Spin Speed (rpm) Spin Speed (rpm) Figure 6 Figure 8 Optical Properties Optical Properties 495 and 950 PMMA Resists Copolymer Resists 1.7 1.7 Cauchy Coeffiecients Cauchy Coeffiecients A...
The curves suggested two exponential decays; the first concerns the dye molecules which may exist outside the core of the PMMA free volume, thus the molecules take a short time to photodegrade at fast rate constant R1. On the other hand, the second rate constant R2 characterizes the slow ...