系统标签: 光子学 nanophysics euv 纳米 nanoelectronics defectivity Extreme Ultraviolet Lithography 20-11rangefrom12°Cto25°C). en,itre uiresacoatingtechnologythatcandepositMo/SiMLswithhighre ectivity(65%–70%),goodthicknessuniformity,andnearlyzerodefectdensity(thedefectivityspeci cationforthe32nmtechnology...
Without abstract.Z. F. Krasil'nikPleiades Publishing LtdSemiconductors
assembly, silicon nanowires, comments on the new success toward human cloning, the achievement of self-replication in a primitive set of electromechanical robots, recognition in the extra chapters of the acceleration toward alternative forms of nanoelectronics. Additional problems have also been provided....
and Applied PhysicsIND40%similarity14 Transactions on Electrical and Electronic MaterialsKOR40%similarity15 Current Applied PhysicsNLD39%similarity16 Journal of Computational ElectronicsNLD39%similarity17 Thin Solid FilmsNLD38%similarity18 International Journal of Nanoelectronics and MaterialsMYS38%similarity19 ...
fast-progressing nanoelectronics and optoelectronics, molecular electronics and spintronics, nanophotonics, nanosensorics and nanoenergetics as well as nanotechnology and quantum processing of information, this book gives readers a more complete understanding of the practical uses of nanotechnology and ...
of DNA as an organizing stratagem in self-assembly, silicon nanowires, comments on the new success toward human cloning, the achievement of self-replication in a primitive set of electromechanical robots, recognition in the extra chapters of the acceleration toward alternative forms of nanoelectronics....
Surface InvestigationDoklady Physics14th International WorkshopPlenary SessionSian AcademyNo abstract available.doi:10.1134/S1063782610110011Z. F. Krasil’nikSP MAIK Nauka/InterperiodicaSemiconductors
Nanophysics and Nanotechnology || Silicon Nanoelectronics and BeyondelectronicsMoore's lawphotolithographic technologywavelengthgeometrical opticsdoi:10.1002/9783527618972.ch9WolfEdward L.
Physics, Chemistry And Application of Nanostructures: Reviews and Short Notes to Nanomeetingdoi:doi:http://dx.doi.org/Nanoelectronics... SV Gaponenko,VS Gurin,VE Borisenko - WORLD SCIENTIFIC 被引量: 5发表: 1995年 Physics, Chemistry and Applications of Nanostructures: REVIEWS AND SHORT NOTE This...
The book is intended as a reference in advanced courses for graduate students and as a guide for researchers and industrial professionals involved in nanoelectronics and nanophotonics applications.doi:10.1007/978-94-017-7478-9Maffucci, Antonio