The stacked structure are then assembled to relized MEMS-CMOS 3D heterogeneous integration. Overall, the present work describes an approach for high density MEMS integration. 展开 关键词: CMOS integrated circuits copper integrated circuit interconnections micromachining microsensors readout electronics sensor...
MEMS硬件也将成为LTE技术亮点部分,将利用MEMS天线开关和数字调谐电容器实现多频带技术。 以智能手机为主的移动设备中,应用了大量传感器以增加其智能性,提高用户体验。这些传感器并非手机等移动/通信设备独有,在本文以及后续文章其他地方所介绍的加速度、化学元素、人体感官传感器等可以了解相关信息,在此不赘叙。此处主要介...
Experiments show that the sensitivity of the ethanol sensor is 0.9 MHz/ppm.Ming-ZhiYangChing-LiangDaiSensors (Basel, Switzerland)M.-Z. Yang and C.-L. Dai, "Ethanol microsensors with a read- out circuit manufactured using the CMOS-MEMS technique," Sensors, vol. 15, no. 1, pp. 1623-...
An integrated mass flow sensor with on-chip CMOS interface circuitry. IEEE Transactions on Electron Devices 1992; 39: 1376–1386. 93 DeHennis AD, Wise KD. A fully integrated multisite pressure sensor for wireless arterial flow characterization. IEEE Journal of Microelectromechanical Systems 2006; ...
MEMS高精度电容读出电路的单芯片集成研究
which considerably reduces the out-of-plane displacement of the resonator’s movable electrode, as illustrated in Fig.5f. Leveraging the anodic bonding auxiliary getter process, they realized high-vacuum packaging. Consequently, the quality factor surpassed 20,000, with the sensor sensitivity reaching ...
Biomechanics of the sensor-tissue interface—effects of motion, pressure, and design on sensor performance and the foreign body response—Part I: theoretical framework. Journal of Diabetes Science Technology 2011; 5: 632–646. Google Scholar Gilletti A, Muthuswamy J . Brain micromotion around ...
A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer In this paper, design, implementation and characterization of a 3-V switched-capacitor (SC) DeltaSigma CMOS interface circuit for the closed-loop operation... Vakili Amini, B,R Abdolvand,F Ayazi - 《IEEE Journal of Solid State Circuit...
The expected sensor Brownian noise floor is around 10 ng/sqrt(Hz), which is still much lower than the detectable noise floor, limited by the interface readout electronics. The dynamic frequency response of the accelerometers was measured using a mechanical shaker in an open-loop setup. A Dytran...
A Low-Noise Low-Offset Chopper-Stabilized Capacitive-Readout Amplifier for CMOS MEMS AccelerometersingentaconnectDigest of Technical Papers of the Solid State Circuits Conference