13.An Integrated MIMU/GPS Navigation System Based on MEMS基于微机械陀螺的IMU/GPS组合导航系统 14.micro-mechanized engineering data微型机械化工程数据 15.Manufacturing Technologies for MEMS at Micro/Nanometer Level微/纳米级微电子机械系统制造新技术 16.Research of Cartoning Manipulator and It s Microcomputer...
MEMS原理-01 MEMS原理 索春光 suochunguang@126.com KunmingUniversityofScienceandTechnologyKunming,ChinaSeptember,2014 01 BASIC INTRODUCTIONTO MEMS WHATARE MEMS ?Outline BasicIntroductiontoMEMS InformationResourcesMainContentsoftheCourse ToolmakinghasalwaysdifferentiatedourspeciesfromallothersonEarth.Ju...
at Autonomous University Micromachines 2016, 7, 14 6 of 21 of Barcelona, a nanometer scale bimetallic nitride resonator capable of dual-clock tuning has been fabricated using a commercial Silterra 0.18 µm technology [26]. In this conception demonstration, in addition to the CMOS compatible ...
Using combined dry/wet etching approaches, integration of structures with nanometer dimensions with conventional CMOS structures have also been vigorously explored. An excellent recent review on relevant devices by Urangaet al.has summarized the efforts in this exciting area [21]. In [86,87], arrays...
Electrostatic tensile testing device with nanonewton and nanometer resolution and its application to C60 nanowire testing. J. Microelectromech. Syst. 2012, 21, 523–529. [CrossRef] 6. Bai, J.; Ma, T.; Chu, W.; Wang, R.; Silva, L.; Michal, C.; Chiao, J.C.; Chiao, M. ...