The article discusses nanotechnology, which generally refers to complete objects which are less than 100 nanometers (nm) in size. Smaller and more powerful microprocessors have resulted to new microelectronic mechanical systems (MEMS) and have enabled functions that support products such as air-bag ...
nano displacement measurementMicro machined micro sensors for gas or flow detection based on physical behaviour of a special layer of a membrane have to fulfil high quality and reliability requirements especially in safety or security applications. Up to now, most of the ...
不过由于MEMS设计和Process结合紧密，Fabless企业想要做出有竞争力的产品周期比较长，初期量很小或者研发期...
A Body Sensor Network With Electromyogram and Inertial Sensors: Multimodal Interpretation of Muscular Activities The evaluation of the postural control system (PCS) has applications in rehabilitation, sports medicine, gait analysis, fall detection, and diagnosis of ma... H Ghasemzadeh,R Jafari,B ...
SITRI has created China’s first complete MEMS + IC software design platform to support the design efforts of both partners and customers. Using the advanced capabilities of these software tools, SITRI can offer design simulation services covering the full range of sensors (including inertial, optica...
微纳系统(Micro and Nano Systems,MNS)无疑是21世纪的一项关键使能技术,因为其可以帮助解决人类面临的几乎所有重大社会挑战,例如可持续增长、流动性、环境问题,特别是气候变化、健康和可再生能源。这一令人着迷的多学科交叉研究领域必定会在未来数年强劲发展,并且已经成为一项重要的经济驱动因素。
MEMS是一门综合学科，学科交叉现象及其明显，主要涉及微加工技术，机械学/固体声波理论，热流理论，电子学，生物学等等。MEMS器件的特征长度从1毫米到1微米，相比之下头发的直径大约是50微米。MEMS传感器主要优点是体积小、重量轻、功耗低、可靠性高、灵敏度高、易于集成等，是微型传感器的主力军，正在逐渐取代传统机械...
1. M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig, H. Rohrer, P. Vettiger, VLSI-NEMS chip for parallel AFM data storage, Sensors and Actuators A: Physical, Volume 80, Issue 2, 10 March 2000, Pag...
1. M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig, H. Rohrer, P. Vettiger, VLSI-NEMS chip for parallel AFM data storage, Sensors and Actuators A: Physical, Volume 80, Issue 2, 10 March 2000, Pag...
在压电MEMS方向以第一作者/通讯作者身份发表国际学术论文50余篇(JMEMS、Microsyst Nanoeng、TUFFC、JMM、EDL、APL、Small、PRA、B&B、ACS Sensors、ACS AMI、Analyst等),并将研究成果出版英文专著章节;在MEMS领域申请和授权国内外发明专利150余项。他多次受邀参加国际学术会议并作报告,近年来先后赴10余个国家和地区在多...