Lam Research24年3月的官方新闻中,宣称推出了一款名为Pulsus™的新系统,系在半导体生产中首次使用脉冲激光沉积(Pulsed Laser Deposition)技术来制作薄膜,并可实现晶圆级大规模生产。该技术能够沉积高掺Sc的AlN薄膜,Sc的比例可达40%(传统的沉积技术,如反应溅射,掺Sc饱和度约为30%),助力5G和Wi-Fi 6射频(RF)滤波...
Why it matters: For the first time in semiconductor production, Lam is using lasers to deposit thin films and bringing pulsed laser deposition (PLD) to wafer-level mass production. Prestis is expected to be key in developing cutting-edge specialty technologies devices, such as RF (radio ...
Pulsed Laser Deposition (PLD) Our Prestis™ product provides thin film deposition solutions for a wide range of complex multi-element materials for Specialty Technologies applications. RF MEMS, Sensors & Transducers Reliant Clean Products Reliant Systems Wet Clean/Strip Our Reliant clean produc...
29 May 2017 Congrats for the collaborative work "Enhanced thermoelectric properties of SnSe thin films grown by pulsed laser glancing-angle deposition" being accepted for publication in Journal of Materiomics!! 27 May 2017 Congrats to Chang!! The manuscript "Chemical integration of reduced graphene ox...
Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Pulsed Laser Deposition (PLD) Reliant Systems Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs. Ad...
Chemical Vapor Deposition (CVD)High-Density Plasma Chemical Vapor Deposition (HDP-CVD)Plasma-Enhanced Chemical Vapor Deposition (PECVD)Pulsed Laser Deposition (PLD)Reliant Systems Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs. ...
Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Pulsed Laser Deposition (PLD) Reliant Systems Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs. Ad...
Chemical Vapor Deposition (CVD)High-Density Plasma Chemical Vapor Deposition (HDP-CVD)Plasma-Enhanced Chemical Vapor Deposition (PECVD)Pulsed Laser Deposition (PLD)Reliant Systems Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs. ...
, and ALD are used to form the critical insulating layers that isolate and protect all of these electrical structures. Pulsed laser deposition (PLD) is used to enable high performance piezoelectric layers. PLD is a physical vapor deposition method that uses high pulsed energy laser light to...